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Formation of microconical structures on Si surface under the action of pulsed periodic Yb-fiber laser radiation

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, , Citation D.S. Polyakov et al 2018 J. Phys.: Conf. Ser. 951 012012 DOI 10.1088/1742-6596/951/1/012012

1742-6596/951/1/012012

Abstract

In this paper the results of microstructuring of monocrystalline silicon by series of nanosecond Yb-fiber laser pulses are presented. It is shown that nanosecond Yb-fiber laser can be successfully applied for creation of microrelief consisting of microcones arrays. Obtained relief provides a reduction of the reflection coefficient below 10% in visible range of the spectrum. It is also established that for creation of microconical relief by nanosecond Yb-fiber laser it is advisable to use "short" nanosecond pulses with pulse durations from several nanoseconds to several tens of nanoseconds.

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10.1088/1742-6596/951/1/012012