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Low-energy electron interactions with chromium hexacarbonyl Cr(CO)6

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, , Citation J. Khreis et al 2017 J. Phys.: Conf. Ser. 875 062003 DOI 10.1088/1742-6596/875/7/062003

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fr.silva@fct.unl.pt

ste-phan.denifl@uibk.ac.at

Author affiliations

1 Laboratório de Colisões Atómicas e Moleculares, CEFITEC, Departamento de Física, Faculdade de Ciências e Tecnologia, Universidade NOVA de Lisboa, Campus de Caparica, 2829-516 Caparica, Portugal

2 Institut für Ionenphysik und Angewandte Physik, Leopold-Franzens Universität Innsbruck, Technikerstraße 25, 6020 Innsbruck, Austria

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1742-6596/875/7/062003

Synopsis

Positive and negative ion formation upon low energy electron interaction with chromium hexacarbonyl precursor molecules used in FEBID applications was studied. The obtained results revealed a noteworthy different fragmentation pattern compared to other precursors. This work contributes to the development and the possible production concerning highly pure nanoscale structures.

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10.1088/1742-6596/875/7/062003