Microelectromechanical sensors for measuring gas pressure

New prototypes and concepts of micro sensors for measuring gas pressure have been developed by using the fabrication technologies for Micro Electro Mechanical Systems (MEMS). The realization of such micro-structured sensors requires sofisticated fabrication processes such as thin film deposition, photolithography and etching techniques. This approach of MEMS sensors for gas pressure is demonstrated by few examples, such as micro-Pirani gauges, resonant vacuum micro gauges and micro spinning rotor gauges.