Abstract
The extraordinary optical transmission (EOT) phenomenon of nano-periodic aperture array in metallic film has been widely investigated and used in biosensors. The surface plasmon resonance and cavity mode in some periodic nanostructures, such as nanohole and nanoslit, cause EOTs at certain wavelengths. This resonance wavelength is sensitive to the refractive index on the surface of periodic nanostructures. Therefore, the metallic nanostructures are expected to be good sensing elements. The sensing performances of gold nanoslit arrays are experimentally and theoretically investigated. Three-dimensional finite difference time domain (FDTD) simulations are utilized to explore their transmission spectra and steady-state field intensity distributions. The electron beam evaporation, electron beam lithography, and ion milling are applied to the gold nanoslit arrays with different widths and periods. The sensing performances of the gold nanoslit array are characterized via transmission spectra in four kinds of refractive index samples. The highest sensitivity reaches 726 nm/RIU when the width of the gold nanoslit array is 38.5 nm.