Desktop microfabrication - initial experiments with a piezoceramic

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Published under licence by IOP Publishing Ltd
, , Citation Greger Thornell et al 1999 J. Micromech. Microeng. 9 434 DOI 10.1088/0960-1317/9/4/322

0960-1317/9/4/434

Abstract

A method for building microstructures from a suspension of micrometre-sized piezoelectric particles by depositing droplets on top of droplets and promoting drying is devised. A micromachined dispensing unit similar to a drop-on-demand inkjet-printer head is used. The relation of the vertical building rate to the ejection frequency and the substrate temperature is established, and a mechanism explaining the tubular structures built is proposed.

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10.1088/0960-1317/9/4/322