Design and fabrication process for electrostatic side-drive motors

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Published under licence by IOP Publishing Ltd
, , Citation A G Frangoul and K B Sundaram 1995 J. Micromech. Microeng. 5 11 DOI 10.1088/0960-1317/5/1/003

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1 Dept. of Electr. & Comput. Eng., Central Florida Univ., Orlando, FL, USA

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0960-1317/5/1/11

Abstract

A new process technique has been implemented for the fabrication of electrostatic side-drive micromotors. In the present technique, polyimide has been used as the hub material for fabricating the 4-pole rotor, 8-pole rotor and the wobble micromotors. Process techniques to achieve the micromachining of these structures are discussed in detail.

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10.1088/0960-1317/5/1/003