Abstract. This paper addresses the design and optimization of thermal actuators employed in a novel MEMS-based material testing system. The testing system is designed to measure the mechanical properties of a variety of materials/structures from thin films to one-dimensional structures, e.g. carbon nanotubes (CNTs) and nanowires (NWs). It includes a thermal actuator and a capacitive load sensor with a specimen in-between. The thermal actuator consists of a number of V-shaped beams anchored at both ends. It is capable of generating tens of milli-Newton force and a few micrometers displacement depending on the beams' angle and their number. Analytical expressions of the actuator thermomechanical response are derived and discussed. From these expressions, a number of design criteria are drawn and used to optimize the device response. The analytical predictions are compared with both finite element multiphysics analysis (FEA) and experiments. To demonstrate the actuator performance, polysilicon freestanding specimens cofabricated with the testing system are tested.

Print publication: Issue 2 (February 2006)
Received 30 June 2005, in final form 16 November 2005
Published 5 January 2006