A new comparator for measurement of diameter and form of cylinders, spheres and cubes under clean-room conditions

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Published under licence by IOP Publishing Ltd
, , Citation M Neugebauer et al 1997 Meas. Sci. Technol. 8 849 DOI 10.1088/0957-0233/8/8/003

0957-0233/8/8/849

Abstract

A newly designed comparator was developed for the measurement of both diameter and form of cylinders, spheres and cubes in only a single specimen setting using a contact probe technique. The measurement volume is mm, and the uncertainty aimed at is 0.01 per 100 mm length for calibrations of outer diameters, form and parallelism. The measured values obtained from outer length comparison measurements between three of PTB's standard length comparators and the new comparator agree within nm.

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10.1088/0957-0233/8/8/003