Abstract
We demonstrate surface emitting distributed feedback quantum cascade lasers emitting at wavelengths from 8.1 μm at 90 K to 8.4 μm at 210 K. The second-order metalized grating is carefully designed using a modified coupled-mode theory and fabricated by contact lithography. The devices show single mode behavior with a side mode suppression ratio above 18 dB at all working temperatures. At 90 K, the device emits an optical power of 101 mW from the surface and 199 mW from the edge. In addition, a double-lobe far-field pattern with a separation of 2.2° is obtained in the direction along the waveguide.