Abstract
We report the application of customer-built scanning thermal microscopy (SThM) based on a commercial atomic force microscope to investigate local thermal inhomogeneity of ZnO varistors. The so-called 3ω method, generally used for measuring macroscale thermal conductivity, is set up and integrated with an atomic force microscope to probe the nanoscale thermal property. Remarkably, thermal contrasts of ZnO varistors are firstly imaged by the SThM, indicating the uniform distribution of spinel phases at triple points. The frequency-dependent thermal signal of ZnO varistors is also studied to present quantitative evaluation of local thermal conductivity of the sample.