The resistive switching characteristics of indium tin oxide (ITO)/Zn1−xCoxO/ITO transparent resistive memory devices were investigated. An appropriate amount of cobalt dopant in ZnO resistive layer demonstrated sufficient memory window and switching stability. In contrast, pure ZnO devices demonstrated a poor memory window, and using an excessive dopant concentration led to switching instability. To achieve suitable memory performance, relying only on controlling defect concentrations is insufficient; the grain growth orientation of the resistive layer must also be considered. Stable endurance with an ON/OFF ratio of more than one order of magnitude during 5000 cycles confirmed that the Co-doped ZnO device is a suitable candidate for resistive random access memory application. Additionally, fully transparent devices with a high transmittance of up to 90% at wavelength of 550 nm have been fabricated.

1.
T. Y.
Tseng
and
S. M.
Sze
,
Nonvolatile Memories Materials, Devices and Applications
(
American Scientific Publishers
,
CA
,
2012
), Vol.
1
.
2.
A.
Midya
,
N.
Gogurla
, and
S. K.
Ray
,
Curr. Appl. Phys.
15
,
706
(
2015
).
3.
F. M.
Simanjuntak
,
D.
Panda
,
T.-L.
Tsai
,
C.-A.
Lin
,
K.-H.
Wei
, and
T.-Y.
Tseng
,
Appl. Phys. Lett.
107
,
033505
(
2015
).
4.
F. M.
Simanjuntak
,
D.
Panda
,
T.-L.
Tsai
,
C.-A.
Lin
,
K.-H.
Wei
, and
T.-Y.
Tseng
,
J. Mater. Sci.
50
,
6961
(
2015
).
5.
D.
Panda
and
T.-Y.
Tseng
,
J. Mater. Sci.
48
,
6849
(
2013
).
6.
A.
Janotti
and
C. G.
Van De Walle
,
Phys. Rev. B: Condens. Matter Mater. Phys.
76
,
165202
(
2007
).
7.
Y.-P.
Wang
,
W.-I.
Lee
, and
T.-Y.
Tseng
,
Appl. Phys. Lett.
69
,
1807
(
1996
).
8.
H.-C.
Cheng
,
S.-W.
Chen
, and
J.-M.
Wu
,
Thin Solid Films
519
,
6155
(
2011
).
9.
D.
Panda
,
C. Y.
Huang
, and
T. Y.
Tseng
,
Appl. Phys. Lett.
100
,
112901
(
2012
).
10.
C. H.
Jia
,
Q. C.
Dong
, and
W. F.
Zhang
,
J. Alloys Compd.
520
,
250
(
2012
).
11.
C.-C.
Lin
,
Z.-L.
Tseng
,
K.-Y.
Lo
,
C.-Y.
Huang
,
C.-S.
Hong
,
S.-Y.
Chu
,
C.-C.
Chang
, and
C.-J.
Wu
,
Appl. Phys. Lett.
101
,
203501
(
2012
).
12.
H.
Li
,
Q.
Chen
,
X.
Chen
,
Q.
Mao
,
J.
Xi
, and
Z.
Ji
,
Thin Solid Films
537
,
279
(
2013
).
13.
D.
Xu
,
Y.
Xiong
,
M.
Tang
, and
B.
Zeng
,
J. Alloys Compd.
584
,
269
(
2014
).
14.
D. L.
Xu
,
Y.
Xiong
,
M. H.
Tang
,
B. W.
Zeng
, and
Y. G.
Xiao
,
Appl. Phys. Lett.
104
,
183501
(
2014
).
15.
H.
Yu
,
M.
Kim
,
Y.
Kim
,
J.
Lee
,
K.
Kim
,
S.
Choi
, and
S.
Cho
,
Electron. Mater. Lett.
10
,
321
(
2014
).
16.
D. L.
Xu
,
Y.
Xiong
,
M. H.
Tang
,
B. W.
Zeng
,
J. Q.
Li
,
L.
Liu
,
L. Q.
Li
,
S. A.
Yan
, and
Z. H.
Tang
,
Microelectron. Eng.
116
,
22
(
2014
).
17.
M. H.
Tang
,
Z. Q.
Zeng
,
J. C.
Li
,
Z. P.
Wang
,
X. L.
Xu
,
G. Y.
Wang
,
L. B.
Zhang
,
S. B.
Yang
,
Y. G.
Xiao
, and
B.
Jiang
,
Solid State Electron.
63
,
100
(
2011
).
18.
H.
Peng
and
T.
Wu
,
Appl. Phys. Lett.
95
,
152106
(
2009
).
19.
S.
Murali
,
J. S.
Rajachidambaram
,
S.-Y.
Han
,
C.-H.
Chang
,
G. S.
Herman
, and
J. F.
Conley
,
Solid State Electron.
79
,
248
(
2013
).
20.
H.-J.
Lee
,
S.-Y.
Jeong
,
C. R.
Cho
, and
C. H.
Park
,
Appl. Phys. Lett.
81
,
4020
(
2002
).
21.
M.
Naeem
,
S. K.
Hasanain
,
M.
Kobayashi
,
Y.
Ishida
,
A.
Fujimori
,
S.
Buzby
, and
S. I.
Shah
,
Nanotechnology
17
,
2675
(
2006
).
22.
L.
Wang
,
F.
Zhang
,
Z.
Xu
,
S.
Zhao
, and
L.
Lu
,
Chinese Sci. Bull.
55
,
897
(
2010
).
23.
G.
Chen
,
C.
Song
,
C.
Chen
,
S.
Gao
,
F.
Zeng
, and
F.
Pan
,
Adv. Mater.
24
,
3515
(
2012
).
24.
See supplementary material at http://dx.doi.org/10.1063/1.4948598 for detailed information on target fabrication and XRD peak simulation.
25.
R.
Waser
,
R.
Dittmann
,
C.
Staikov
, and
K.
Szot
,
Adv. Mater.
21
,
2632
(
2009
).
26.
S. H.
Jeong
and
J. H.
Boo
,
Thin Solid Films
447–448
,
105
(
2004
).
27.
D.
Panda
and
T.-Y.
Tseng
,
Ferroelectrics
471
,
23
(
2014
).
28.
D.
Panda
and
T.-Y.
Tseng
,
Thin Solid Films
531
,
1
(
2013
).
29.
M.
Chen
,
X.
Wang
,
Y. H.
Yu
,
Z. L.
Pei
,
X. D.
Bai
,
C.
Sun
,
R. F.
Huang
, and
L. S.
Wen
,
Appl. Surf. Sci.
158
,
134
(
2000
).
30.
U.
Ilyas
,
R. S.
Rawat
,
T. L.
Tan
,
P.
Lee
,
R.
Chen
,
H. D.
Sun
,
L.
Fengji
, and
S.
Zhang
,
J. Appl. Phys.
110
,
093522
(
2011
).
31.
W.-Y.
Chang
,
Y.-C.
Lai
,
T.-B.
Wu
,
S.-F.
Wang
,
F.
Chen
, and
M.-J.
Tsai
,
Appl. Phys. Lett.
92
,
022110
(
2008
).
32.
B. D.
Cullity
and
S. R.
Stock
,
Elements of X-Ray Diffraction
(
Prentice Hall
,
2001
).
33.
F. K.
Lotgering
,
J. Inorg. Nucl. Chem.
16
,
100
(
1960
).
34.
G.
Wang
,
S.
Long
,
Z.
Yu
,
M.
Zhang
,
Y.
Li
,
D.
Xu
,
H.
Lv
,
Q.
Liu
,
X.
Yan
,
M.
Wang
,
X.
Xu
,
H.
Liu
,
B.
Yang
, and
M.
Liu
,
Nanoscale Res. Lett.
10
,
39
(
2015
).
35.
N.
Yamamoto
,
T.
Yamada
,
A.
Miyake
,
H.
Makino
,
S.
Kishimoto
, and
T.
Yamamoto
,
J. Electrochem. Soc.
155
,
J221
(
2008
).

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