KrF excimer laser ablation of liquid benzene was studied by a nanosecond imaging technique. The ejection of a plume followed by remarkable transient morphological changes took place, which was directly observed over a wide range of the fluence. From imaging data, an ablation threshold was determined to be 100 mJ/cm2 and ablation behavior induced by electronic excitation of liquid molecules is considered. A delay time prior to the plume ejection is about 40±20 ns, while the remarkable morphological change ranges from sub‐μs to ms time regime.
REFERENCES
1.
2.
3.
H. Masuhara, A. Itaya, and H. Fukumura, Polymers in Microlithography: Materials and Processes, edited by E. Reichmanis, S. A. MacDonald, and T. Iwayanagi (American Chemical Society, Washington DC, 1989), p. 400.
4.
H.
Masuhara
, S.
Eura
, H.
Fukumura
, and A.
Itaya
, Chem. Phys. Lett.
156
, 204
(1989
).5.
H.
Fukumura
, H.
Nakaminami
, S.
Eura
, H.
Masuhara
, and T.
Kawai
, Appl. Phys. Lett.
58
, 2546
(1991
).6.
7.
B. J.
Palmer
, T.
Keyes
, R. H.
Clarke
, and J. M.
Isner
, J. Phys. Chem.
93
, 7509
(1989
).8.
R. L. Armstrong, Optical Effects Associated with Small Particles, edited by P. W. Barber and R. K. Chang (Work Scientific, Singapore, 1988), Chap. 4.
9.
R. E.
Mueller
, J. B.
Bird
, and W. W.
Duley
, J. Appl. Phys.
71
, 551
(1992
).10.
11.
12.
13.
Y. B. Zel’dovich and Y. P. Raiser, Physics of Shock Waves and High Temperature Hydrodynamic Phenomena (Academic, New York, 1967).
14.
I.-Y. S.
Lee
, X.
Wen
, W. A.
Tolbert
, D. D.
Dlott
, M.
Doxtader
, and D. R.
Arnold
, J. Appl. Phys.
72
, 2440
(1992
).15.
H. Fukumura, E. Takahashi, and H. Masuhara (unpublished).
16.
R.
Srinivasan
, B.
Braren
, K. G.
Casey
, and M.
Yeh
, Appl. Phys. Lett.
55
, 2790
(1989
).17.
18.
19.
G.
Paraskevopoulos
, D. L.
Singleton
, R. S.
Irwin
, and R. S.
Taylor
, J. Appl. Phys.
70
, 1938
(1991
).
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© 1994 American Institute of Physics.
1994
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