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Crystal silicon Fabry-Perot cavities deposited with dichlorosilane in a reduced pressure chemical vapour deposition reactor for thermal sensing

Crystal silicon Fabry-Perot cavities deposited with dichlorosilane in a reduced pressure chemical vapour deposition reactor for thermal sensing

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Published

A surface-normal Fabry-Perot (FP) thermal sensor with embedded multiple QW dielectric mirrors, was fabricated and evaluated using a single crystal merged silicon epitaxial lateral overgrowth (MELO) technique. The sensitivity of the sensor has been improved owing to the higher finesse.

Inspec keywords: Fabry-Perot resonators; temperature sensors; thermo-optical effects; mirrors; silicon; cavity resonators; elemental semiconductors; microsensors; vapour phase epitaxial growth; silicon-on-insulator; refractive index; optical sensors

Other keywords: embedded multiple QW dielectric mirrors; MELO technique; crystalline Si; reduced pressure CVD reactor; chemical vapour deposition; Fabry-Perot cavities; merged epitaxial lateral overgrowth; thermal sensing; dichlorosilane; Si; surface-normal Fabry-Perot sensor

Subjects: Thermometry; Chemical vapour deposition; Sensing and detecting devices; Epitaxial growth; Sensing devices and transducers; Thermal variables measurement

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