Issue 10, 2021
From the journal:

Nanoscale Advances

Flexible fabrication of new-type porous anodic alumina membranes with tunable geometric features by low-cost nanoimprint lithography†

Xianzhong Lang, ORCID logo *ab   Xudong Wang,b   Ji Mab  and  Teng Qiu ORCID logo a  

* Corresponding authors

a School of Physics, Southeast University, Nanjing 211189, P. R. China

b School of Microelectronics and Control Engineering, Changzhou University, Changzhou 213164, P. R. China
E-mail: xzlang@cczu.edu.cn

Abstract

A novel process for the flexible fabrication of new-type porous anodic alumina (PAA) membranes with tunable geometric features is described. In this process, the conventional PAA template as a cost-effective nanoimprint stamp is employed to transfer the anti-structure nanopits onto aluminum sheet substrates, and the subsequent guided anodization of the pre-patterned substrates leads to new-type PAAs. By further adjusting the anode voltages of PAA stamps, imprinting pressures and guided anode voltages, a series of new-type PAAs with controlled para-pore spacing, surface topography and nanopore arrangement are achieved. The new-type PAAs provide a low-cost flexible option for the preparation of arrays with utility in photonic, electronic and magnetic devices.

Graphical abstract: Flexible fabrication of new-type porous anodic alumina membranes with tunable geometric features by low-cost nanoimprint lithography

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Article information

DOI
https://doi.org/10.1039/D0NA00916D
Article type
Paper
Submitted
02 Nov 2020
Accepted
23 Mar 2021
First published
24 Mar 2021
This article is Open Access
Creative Commons BY-NC license

Nanoscale Adv., 2021,3, 2918-2923

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Flexible fabrication of new-type porous anodic alumina membranes with tunable geometric features by low-cost nanoimprint lithography

X. Lang, X. Wang, J. Ma and T. Qiu, Nanoscale Adv., 2021, 3, 2918 DOI: 10.1039/D0NA00916D

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