Long-range ordered vertical III-nitride nano-cylinder arrays via plasma-assisted atomic layer deposition

Ali Haider; Petro Deminskyi; Mehmet Yilmaz; Kholoud Elmabruk; Ibrahim Yilmaz; Necmi Biyikli

doi:10.1039/C8TC01165F

Long-range ordered vertical III-nitride nano-cylinder arrays via plasma-assisted atomic layer deposition†

Ali Haider,

‡^a Petro Deminskyi,‡^a Mehmet Yilmaz,^a Kholoud Elmabruk,^b Ibrahim Yilmaz^d and Necmi Biyikli*^c

Author affiliations

* Corresponding authors

^a UNAM – Institute of Materials Science and Nanotechnology, Bilkent University, Ankara 06800, Turkey

^b Department of Electrical Engineering, Aljabal Algharbi University, Gharian, Libya

^c University of Connecticut, Department of Electrical and Computer Engineering, 371 Fairfield Way, U-4157 Storrs, Connecticut, USA
E-mail: necmi.biyikli@uconn.edu

^d Turgut Özal University, Department of Electrical and Electronics Engineering, Etlik-Kecioren, Ankara, Turkey

Abstract

In this work, we demonstrate vertical GaN, AlN, and InN hollow nano-cylindrical arrays (HNCs) grown on Si substrates using anodized aluminum oxide (AAO) membrane templated low-temperature plasma-assisted atomic layer deposition (PA-ALD). III-Nitride HNCs have been characterized for their structural, chemical, surface, and optical properties. The material properties of nanostructured III-nitride materials have been compared with the thin-film counterparts which were also grown using PA-ALD. Our results revealed that long-range ordered arrays of III nitride HNCs were successfully integrated on Si substrates and possess hexagonal polycrystalline wurtzite crystalline structure. Such long-range ordered wafer-scale III-nitride nanostructures might be potentially used in piezotronic sensing, energy harvesting, resistive memory, flexible and wearable electronics, III-nitride photovoltaics, and (photo)catalysis.

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DOI: https://doi.org/10.1039/C8TC01165F
Article type: Paper
Submitted: 09 Mar 2018
Accepted: 18 May 2018
First published: 21 May 2018

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J. Mater. Chem. C, 2018,6, 6471-6482

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Long-range ordered vertical III-nitride nano-cylinder arrays via plasma-assisted atomic layer deposition

A. Haider, P. Deminskyi, M. Yilmaz, K. Elmabruk, I. Yilmaz and N. Biyikli, J. Mater. Chem. C, 2018, 6, 6471 DOI: 10.1039/C8TC01165F

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Journal of Materials Chemistry C

Long-range ordered vertical III-nitride nano-cylinder arrays via plasma-assisted atomic layer deposition†

Abstract

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Long-range ordered vertical III-nitride nano-cylinder arrays via plasma-assisted atomic layer deposition

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