Issue 68, 2016, Issue in Progress

Expedient floating process for ultra-thin InGaZnO thin-film-transistors and their high bending performance

Abstract

Recently, much attention has been focused on the development of devices with ultra-thin sample thickness for imperceptible and patchable applications, but the use of inorganic active films in flexible electronics has seen a great obstacle due to brittle mechanical properties during bending, despite better electrical performance and high stability. We report a procedure for fabricating organic electronic devices on ultra-thin polymer substrates using a floating process. This process uses water soluble polyvinyl alcohol (PVA) as a sacrificial layer and the maximum process temperature is increased until around 200 °C, which is a valuable condition for high-quality InGaZnO channels and Al2O3 gate dielectrics. The 400 nm PVA coating produced with low molecular weight characteristics had relatively smooth surface roughness and quick floating process. The ultra-thin InGaZnO TFT showed good transfer and reproducible performance under extreme bending conditions due to the use of ultra-thin compliant substrates.

Graphical abstract: Expedient floating process for ultra-thin InGaZnO thin-film-transistors and their high bending performance

Supplementary files

Article information

Article type
Paper
Submitted
10 Mar 2016
Accepted
27 Jun 2016
First published
04 Jul 2016

RSC Adv., 2016,6, 63418-63424

Author version available

Expedient floating process for ultra-thin InGaZnO thin-film-transistors and their high bending performance

W. J. Kang, C. H. Ahn, M. G. Yun, S. W. Cho, Y. K. Kim, D. E. Kim, B. Kim, H. K. Cho and Y. Kim, RSC Adv., 2016, 6, 63418 DOI: 10.1039/C6RA06372A

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