Synthesis and characterization of a photosensitive organic–inorganic, hybrid positive resin type material: application to the manufacture of microfluidic devices by laser writing

Elias Mechref; Jihane Jabbour; Sylvie Calas-Etienne; Kassem Amro; Ahmad Mehdi; Rabih Tauk; Doumit Zaouk; Pascal Etienne

doi:10.1039/C5RA21393B

Synthesis and characterization of a photosensitive organic–inorganic, hybrid positive resin type material: application to the manufacture of microfluidic devices by laser writing

Elias Mechref,^ab Jihane Jabbour,*^b Sylvie Calas-Etienne,^a Kassem Amro,^a Ahmad Mehdi,^c Rabih Tauk,^b Doumit Zaouk^d and Pascal Etienne^a

Author affiliations

* Corresponding authors

^a Charles Coulomb Laboratory, University of Montpellier, Place E. Bataillon, UMR 5221, cc074, 34095 Montpellier Cedex 5, France

^b Platform for Research in Nanosciences and Nanotechnology, Faculty of Sciences 2, Lebanese University, Campus Fanar, BP90239. Jdedeit, Lebanon
E-mail: Jihane.Jabbour@ul.edu.lb

^c Institute Charles Gerhardt, Chimie Moléculaire et Organisation du solide, UMR 5253, University of Montpellier, cc1701, Place Eugene Bataillon, 34095 Montpellier Cedex 5, France

^d Applied Physics Laboratory, Faculty of Sciences 2, Lebanese University, Campus Fanar, BP 90656 Jdedeit, Lebanon

Abstract

A positive working and chemical amplified photosensitive organic–inorganic hybrid material based on PAA polymer with a lower molecular weight, 1,3,5-tris[(2-vinyloxy)ethoxy]benzene (TVEB) as a crosslinking dissolution inhibitor, a VEPTES pre-hydrolysed as an organic–inorganic material and a PAG photoacid generator was developed. The TVEB was prepared by coupling 1,3,5-trihydroxybenzene and 2-chloroethyl vinyl ether. The hybrid photosensitive material showed sensitivity when exposed to UV light at 375 nm followed by development with a 2.38 wt% aqueous solution of TMAH at room temperature. The synthesis of the material was followed by FTIR spectroscopy to follow the crosslinking of the vinyl ether group from TVEB and VEPTES with the carboxylic group of the PAA polymer.

Article information

https://doi.org/10.1039/C5RA21393B

Article type

Paper

Submitted

14 Oct 2015

Accepted

11 Dec 2015

First published

07 Jan 2016

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RSC Adv., 2016,6, 3951-3959

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Synthesis and characterization of a photosensitive organic–inorganic, hybrid positive resin type material: application to the manufacture of microfluidic devices by laser writing

E. Mechref, J. Jabbour, S. Calas-Etienne, K. Amro, A. Mehdi, R. Tauk, D. Zaouk and P. Etienne, RSC Adv., 2016, 6, 3951 DOI: 10.1039/C5RA21393B

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Synthesis and characterization of a photosensitive organic–inorganic, hybrid positive resin type material: application to the manufacture of microfluidic devices by laser writing

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Synthesis and characterization of a photosensitive organic–inorganic, hybrid positive resin type material: application to the manufacture of microfluidic devices by laser writing

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