Abstract
This paper describes the fabrication and characterization of a microelectronic device for the electrical interrogation and impedance spectroscopy of biological species. Key features of the device include an all top-side processing for the formation of fluidic channels, planar fluidic interface ports, integrated metal electrodes for impedance measurements, and a glass cover sealing the non-planar topography of the chip using spin-on-glass as an intermediate bonding layer. The total fluidic path volume in the device is on the order of 30 nl. Flow fields in the closed chip were mapped by particle image velocimetry. Electrical impedance measurements of suspensions of the live microorganism Listeria innocua injected into the chip demonstrate an easy method for detecting the viability of a few bacterial cells. By-products of the bacterial metabolism modify the ionic strength of a low conductivity suspension medium, significantly altering its electrical characteristics.
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References
AOAC, Official methods of analysis of AOAC International, 16th ed. (Association of Official Analytical Chemists International, Gaithersburg, MD, 1996).
H. Ayliffe, A. Frazier, and R. Rabbitt, IEEE Journal of Microelectromechanics 8(1), 50-57 (1999).
A.J. Bard and L.R. Faulkner, Electrochemical Methods (John Wiley & Sons, 1980).
C. Berggren, B. Bjarnason, and G. Johansson, Biosensors and Bioelectronics 13, 1061-1068 (1998).
H. Berncy, J. Alderman, W. Lane, and J. Collins, Sensors and Actuators B 44, 578-584 (1997).
D. Borkholder, I. Opris, N. Maluf, and G. Kovacs, Annual International Conference of the IEEE Engineering in Medicine and Biology—Proceedings, 106-107, IEEE. (1996).
M. DeSilva, Y. Zhang, P. Hesketh, G. Maclay, S. Gendel, and J. Stetter, Biosensors and Bioelectronics 10, 675-682 (1995).
V. Dragoi, M. Alexe, M. Reiche, and U. Gösele, CAS'99 Proceedings, 1999 International Semiconductor Conference, 2, 443-446 (IEEE, 1999).
S. Duey, Master's thesis, Purdue University (1988).
A. Edmiston and S. Russell, Journal of Food Protection 63(2), 264-267 (2000).
R. Ehret, W.B.M.B.A.S.K. Stegbauer, and B. Wolf, Biosensors and Bioelectronics 12(1), 29-41 (1997).
C. Felice, R. Madrid, J. Olivera, V. Rotger, and M. Valentinuzzi, Journal of Microbiological Methods 35, 37-42 (1999).
S. Fodor, M. Read, J. Pirrung, L. Stryer, A. Lu, and D. Solas, Science 251, 767-773 (1991).
R. Fox and A. McDonald, Introduction to Fluid Mechanics (John Wiley & Sons, 1998).
D. Gibson, P. Coombs, and D. Pimbley, Journal of AOAC International 75(2), 293-302 (1992).
F. Harrison, K. Fluri, N. Chiem, T. Tang, and Z. Fang, Micromachining, Sensors and Actuators B 33, 105-109 (1996).
M. Heller, IEEE Engineering in Medicine and Biology 15, 100-103 (1996).
T. Hoshi, J. Anzai, and T. Osa, Analytica Chimica Acta 289, 321-327 (1994).
P. Jacobs, W. Hofer, R. Rossau, A.V. de Voorde, P.V. Gerwen, and P. Detemple, Proceedings of the Second International Conference on Microreaction Technology (New Orleans, LA, U.S.A., 223-229, 1998).
G. Jobst, I. Moser, P. Svasek, M. Varahram, Z. Trajanoski, P. Wach, P. Kotanko, F. Skrabal, and G. Urban, Sensors and Actuators B 43, 121-125 (1997).
C. Meinhart, S. Wereley, and J. Santiago, Experiments in Fluids 27(5), 414-419 (1999).
V. Mirsky, M. Mass, C. Krause, and O. Wolfbeis, Analytical Chemistry 70, 3674-3678 (1998).
V. Mirsky, M. Riepl, and O. Wolfbeis, Biosensors and Bioelectronics 12(9–10), 977-989 (1997).
M. Paeschke, L. Buchman, R. Seitz, and R. Hintsche, Microsystem Technologies 96, 687-692 (VDE-Verlag GMBH, 1996).
M. Riepl, V. Mirsky, I. Novotny, V. Tvarozek, V. Rehacek, and O. Wolfbeis, Analytica Chimica Acta 392, 77-84 (1999).
M. Schöning, M. Thust, M. Müller-Veggian, P. Kordoš, and H. Lüth, Sensors and Actuators B 47, 225-230 (1998).
Spin-On-Glass, Methylsilsesquioxane 400F Product Data Sheet (Filmtronics Inc., Pennsylvania, U.S.A., 1998).
B.C. Towe and V.B. Pizziconi, Biosensors and Bioelectronics 97(9), 893-899 (1997).
P. Van Gerwen, W. Laureyn, W. Laureys, G. Huyberechts, M. Op De Beeck, K. Baert, J. Suls, W. Sansen, P. Jacobs, L. Hermans, and R. Mertens, Sensors and Actuators B 49, 73-80 (1998a).
P. Van Gerwen, A. Varla, G. Huyberechts, M. Op De Beeck, K. Baert, W. Sansen, L. Hermans, and R. Mertens, Microreaction Technology: Proceedings of the First International Conference on Microreaction Technology 289-293 (Springer-Verlag, 1998b).
K.J. Vetter, Electrochemical Kinetics (Academic Press, 1967).
T. Vo-Dinh and B. Cullum, Fresenius Journal of Analytical Chemistry 366, 540-551 (2000).
J. Wang, G. Rivas, C. Parrado, X. Cai, and M. Flair, Talanta 44, 2003-2010 (1997).
A. Warsinke, A. Benkert, and F. Scheller, Fresenius Journal of Analytical Chemistry 366, 622-634 (2000).
M. Wawerla, A. Stolle, B. Schalch, and H. Eisgruber, Journal of Food Protection 62(12), 1488-1496 (1999).
S. Wereley and C. Meinhart, Proceedings of the 10th International Symposium on the Application of Laser Techniques to Fluid Mechanics (2000).
A. Woolley and R. Mathies, Analytical Chemistry 67(20), 3676-3680 (1995).
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Go´mez, R., Bashir, R., Sarikaya, A. et al. Microfluidic Biochip for Impedance Spectroscopy of Biological Species. Biomedical Microdevices 3, 201–209 (2001). https://doi.org/10.1023/A:1011403112850
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DOI: https://doi.org/10.1023/A:1011403112850