Skip to main content
SpringerLink
Log in

Realization of Integrated Narrow Bandpass Filters in the Infrared Region

  • Published:
International Journal of Infrared and Millimeter Waves Aims and scope Submit manuscript

Abstract

We demonstrated a high-efficiency technique for the integration of narrow bandpass filters (NBPFs). A filter array integrated with 16 filters on a single substrate has been fabricated by only twice depositing processes. The bandpass of the filters can be tuned widely and range from 2.295 to 2.967 μm in this case. The relative full width at half maximum (FWHM) δλ/λ of each filter is less than 0.7%. And the intensity of the bandpass is up to 41.3%.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. M. Hauta-Kasari, K. Miyazawa, S. Toyooka, and J. Parkkinen, The Journal of the Opt. Soc. of Am. A 16, 2352 (1999).

    Google Scholar 

  2. M. Frank, B. Schallenberg, N. Kaiser, Opt. Eng. 36, 1220 (1997).

    Google Scholar 

  3. M. Frank, U. Schallenberg, N. Kaiser, W. Buss, Proc. SPIE 3008, 265 (1997).

    Google Scholar 

  4. M. Marso, M. Wolter, R. Arens-Fischer, H. Lüth, Thin Solid Films 382, 218 (2001).

    Google Scholar 

  5. D. Hunkel, M. Marso, R. Butz, R. Arens-Fischer, H. Lüth, Materials Science and Engineering B69–70, 100 (2000).

    Google Scholar 

  6. T. Amano, F. Koyama, N. Nishiyama, and K. Iga, Jpn. J. Appl. Phys. 39, 673 (2000).

    Google Scholar 

  7. R. Shogenji, Y. Kitamura, K. Yamada, S. Miyatake, J. Tanida, Optics Express 12, 1643 (2004).

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. National Laboratory for Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai, 200083, China

    Shao-Wei Wang, Dingquan Liu & Bin Lin

  2. National Laboratory for Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai, 200083, China

    Xiaoshuang Chen, Zhifeng Li, Yan Shi, Wei Wang & Wei Lu

Authors
  1. Shao-Wei Wang
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Dingquan Liu
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Bin Lin
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Xiaoshuang Chen
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. Zhifeng Li
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. Yan Shi
    View author publications

    You can also search for this author in PubMed Google Scholar

  7. Wei Wang
    View author publications

    You can also search for this author in PubMed Google Scholar

  8. Wei Lu
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Wang, SW., Liu, D., Lin, B. et al. Realization of Integrated Narrow Bandpass Filters in the Infrared Region. International Journal of Infrared and Millimeter Waves 25, 1677–1683 (2004). https://doi.org/10.1023/B:IJIM.0000047457.40979.6e

Download citation

  • Issue Date:

  • DOI: https://doi.org/10.1023/B:IJIM.0000047457.40979.6e

Search

Navigation