Skip to main content
SpringerLink
Log in

A study of optical characteristics of damage in oxygen-implanted 6H-SiC

  • Published:
Journal of Materials Science Letters

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

References

  1. G. M¨uller, G. Kr¨ otz and E. Niemann, Sensors and Actuators A 43(1994) 259.

    Google Scholar 

  2. D. M. Brown, E. Downey, M. Grezzor, J. Kretchmer, V. Krishnamrthy, W. Hennessy and G. Michon, Solid State Electronics 59(1996) 1531.

    Google Scholar 

  3. W. Wesch, Beam Interactions with Materials and Atoms 116(1996) 305.

    Google Scholar 

  4. T. Kimoto, T. Nakajima, H. Matsunami, T. Nakata and M. Inoue, Appl. Phys. Lett. 69(1996) 1113.

    Google Scholar 

  5. R. K. Nadella and M. A. Capano, ibid. 70(1997) 886.

    Google Scholar 

  6. D. Alok and B. J. Baliga, J. Electrochem. Soc. 144(1997) 1135.

    Google Scholar 

  7. Idem.,ibid. 26(1997) 134.

  8. M. G. Grimaldi, L. Calcagno, P. Musumeci, N. Frangis and J. Van Landuyt, J. Appl. Phys. 81(1997)7181.

    Google Scholar 

  9. S. Ninomiya and S. Adachi, Jpn. J. Appl. Phys. 33(1994)2479.

    Google Scholar 

  10. R. Capelletti, A. Miotello and P. M. Ossi, J. Appl. Phys. 81(1997) 146.

    Google Scholar 

  11. P. Musumeci, L. Calcagno, M. G. Grimaldi and G. Foti, Appl. Phys. Lett. 69(1996) 468.

    Google Scholar 

  12. A. D. Laine, A. M. Mezzasalma, S. Rizzo and G. Mondio, Beam Interactions with Materials and Atoms 116(1996) 338.

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. State Key Laboratory of Functional Materials for Informatics and Ion Beam Laboratory,, Shanghai Institute of Metallurgy Chinese Academy of Sciences,, Shanghai, 200050,, People's Republic of China

    Lianwei Wang, Jipo Huang, Chenglu Lin & Shichang Zou

  2. Department of Physics,, Fudan University,, Shanghai, 200433,, People's Republic of China

    Yuxiang Zheng, Xinjun Wang & Daming Huang

  3. KTH,, Royal Institute of Technology,, Electrum 229,, SE-16440,, Kista-Stockholm,, Sweden

    C. M. Zetterling & M. Östling

Authors
  1. Lianwei Wang
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Jipo Huang
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Chenglu Lin
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Shichang Zou
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. Yuxiang Zheng
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. Xinjun Wang
    View author publications

    You can also search for this author in PubMed Google Scholar

  7. Daming Huang
    View author publications

    You can also search for this author in PubMed Google Scholar

  8. C. M. Zetterling
    View author publications

    You can also search for this author in PubMed Google Scholar

  9. M. Östling
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Wang, L., Huang, J., Lin, C. et al. A study of optical characteristics of damage in oxygen-implanted 6H-SiC. Journal of Materials Science Letters 18, 979–982 (1999). https://doi.org/10.1023/A:1006627610829

Download citation

  • Issue Date:

  • DOI: https://doi.org/10.1023/A:1006627610829

Keywords

Search

Navigation