Web Release Date: November 30,
Periodic Holes with 10 nm Diameter Produced by Grazing Ar+ Milling of the Barrier Layer in Hexagonally Ordered Nanoporous Alumina
and
MINT Center and Departments of Chemistry and Metallurgical and Materials Engineering, The University of Alabama, Tuscaloosa, Alabama 35487-0336
Received October 1, 2001
Revised October 24, 2001
Abstract:
Long-term anodization of aluminum provides a hexagonally ordered array of nanopores with very uniform pore diameters (between 30 and 50 nm, depending on pH, acid, and potential) and pore spacings of 80 to 100 nm within a matrix of amorphous aluminum oxide. However, one often desires smaller diameters. Because the bottom of each pore is U-shaped, we can use this geometrical feature and gradually open the U-shaped bottom cap of the alumina nanochannel by controlled grazing angle Ar+ ion milling and thus form smaller pore apertures. In initial results, we prepared opened holes with a diameter as small as 10 nm. This opens the door to numerous applications that need small but hexagonally periodic features produced by inexpensive means.
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