J. Phys. Chem. B, 101 (48), 9973 -9977, 1997. jp972818l S1089-5647(97)02818-6

Copyright © 1997 American Chemical Society

Model Catalysts Fabricated Using Electron Beam Lithography and Pulsed Laser Deposition

Aaron S. Eppler, Günther Rupprechter, László Guczi, and Gabor A. Somorjai*

Department of Chemistry, University of California, Berkeley, and Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720, Department of Surface Chemistry and Catalysis, Institute of Isotopes of the Hungarian Academy of Sciences, P.O. Box 77, Budapest, H-1525, Hungary

Received: August 28, 1997

In Final Form: September 27, 1997

Abstract:

Supported metal nanoparticles have been fabricated using electron beam lithography (EBL) and pulsed laser deposition (PLD). EBL produced ordered two-dimensional arrays with particle diameters of 40 ± 0.5 nm, uniform interparticle distances (230 ± 2 nm), and uniform height (20 ± 0.5 nm). Due to the narrow size distribution of the particles and the long-range (cm²) order, the arrays produced using EBL were applied as models for supported metal catalysts. Smaller particle sizes can be obtained using PLD, but with larger size and spatial distributions of the particles. Particles fabricated with PLD have mean sizes ranging from 2 to 50 nm, depending on the ambient pressure during deposition. The nanoparticles have been characterized using TEM, AFM, UPS, and SEM. Reaction studies of ethylene hydrogenation on Pt nanoparticle arrays have demonstrated that detectable amounts of ethane are produced, despite the low surface area of the model catalysts.

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