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Development of X-ray 2D dispersive device for WD-XRF imaging spectrometer

Published online by Cambridge University Press:  15 June 2012

Takashi Ohmori*
Affiliation:
Graduate School of Engineering, Osaka City University, 3-3-138 Sugimoto, Sumiyoshi-ku, Osaka 558-8585, Japan
Masatoshi Hatayama
Affiliation:
NTT Advanced Technology Co., 3-1 Morinosato, Wakamiya, Atsugi, Kanagawa 243-0124, Japan
Tadayuki Ohchi
Affiliation:
NTT Advanced Technology Co., 3-1 Morinosato, Wakamiya, Atsugi, Kanagawa 243-0124, Japan
Hisashi Ito
Affiliation:
NTT Advanced Technology Co., 3-1 Morinosato, Wakamiya, Atsugi, Kanagawa 243-0124, Japan
Hisataka Takenaka
Affiliation:
NTT Advanced Technology Co., 3-1 Morinosato, Wakamiya, Atsugi, Kanagawa 243-0124, Japan
Kouichi Tsuji
Affiliation:
Graduate School of Engineering, Osaka City University, 3-3-138 Sugimoto, Sumiyoshi-ku, Osaka 558-8585, Japan
*
a)Author to whom correspondence should be addressed. Electronic mail: tsuji@a-chem.eng.osaka-cu.ac.jp

Abstract

Micro-X-ray fluorescence (XRF) analysis provides us with elemental maps that are very useful for understanding the samples under test. Usually, scanning-type elemental mapping is performed. That means a sample stage is scanned to a fixed X-ray microbeam. XRF analysis is performed at the scanned points, leading to 2D elemental mapping. One of the drawbacks of this technique is the long acquisition time depending on the area being mapped and the lateral resolution required. Thus, projection-type elemental mapping has been studied. We have studied the projection type XRF imaging by using a straight polycapillary optic combined with an X-ray CCD camera. To obtain the elemental map, we applied a wavelength dispersive spectrometer (WDS). In this paper, we report a newly developed 2D dispersive device. The construction and analytical performance of this X-ray optic will be explained.

Type
Technical Articles
Copyright
Copyright © International Centre for Diffraction Data 2012

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