A 5 wt% CoO_x/TiO₂ catalyst has been used to study the effect of calcination temperature on the activity of this catalyst for CO oxidation at 100 °C under a net oxidizing condition in a continuous flow type fixed-bed reactor system, and the catalyst samples have been characterized using TPD, XPS and XRD measurements. The catalyst after calcination at 450 °C gave highest activity for this low-temperature CO oxidation, and XPS measurements yielded that a 780.2-eV Co 2p_3/2 main peak appeared with this catalyst sample and this binding energy was similar to that measured with pure Co₃O₄. After calcination at 570 °C, the catalyst, which had possessed practically no activity in the oxidation reaction, gave a Co 2p_3/2 main structure peak at 781.3 eV which was very similar to those obtained for synthesized Co_nTiO_n+2 compounds (CoTiO₃ and Co₂TiO₄), and this catalyst sample had relatively negligible CO chemisorption as observed by TPD spectra. XRD peaks indicating only the formation of Co₃O₄ particles on titania surface were developed in the catalyst samples after calcination at temperatures ≥350 °C. Based on these characterization results, five types of Co species could be modeled to exist with the catalyst calcined at different temperatures. Among these surface Co species, the Type A clean Co₃O₄ particles were predominant on a sample of the catalyst after calcination at 450 °C and highly active for CO oxidation at 100 °C, and the calcination at 570 °C gave the Type B Co₃O₄ particles with complete Co_nTiO_n+2 overlayers inactive for this oxidation reaction.