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Microelectronic Engineering
Volume 84, Issue 4, April 2007, Pages 590-593
 
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doi:10.1016/j.mee.2006.11.012    How to Cite or Link Using DOI (Opens New Window)
Copyright © 2006 Elsevier B.V. All rights reserved.

The meta-stable dip (MSD) effect in SOI FinFETs

Jang-Gn Yuna, Maryline Bawedinb, c, Sorin Cristoloveanub, Denis Flandrec and Hi-Deok Leea, Corresponding Author Contact Information, E-mail The Corresponding Author

aDepartment of Electronics Engineering, Chungnam National University, Yuseong, Daejeon 305-764, Republic of Korea bInstitute of Microelectronics, Electromagnetism and Photonics, ENSERG, B.P. 257, 38016 Grenoble Cedex, France cMicroelectronics Laboratory, Université Catholique de Louvain (UCL), Place de Levant 3, B-1348 Louvain-La-Neuve, Belgium

Received 10 August 2006; 
revised 31 October 2006; 
accepted 30 November 2006. 
Available online 9 January 2007.

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Abstract

The meta-stable dip (MSD) effect is demonstrated and characterized in SOI FinFETs. With ascending scan of front-gate voltage (VG1), the magnitude of drain current (ID) tends to be fixed within a specific region of the front-gate voltage and this leads to a dip of transconductance (gm). The dip width can be modulated through a control of bias condition or measurement speed such as back-gate voltage (VG2), drain voltage (VD) and step size of the front-gate voltage. From the dual-gate transient measurement, it is found that the MSD effect is highly dependent on the floating-body effect. In SOI FinFETs, the MSD effect is significantly affected by the fin width due to the fringing electric field of the lateral gates.

Keywords: MSD effect; Floating-body effect; Transient effect; SOI; FinFETs

Article Outline

1. Introduction
2. Results and discussion
3. Conclusion
Acknowledgements
References





 
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