Elsevier

Journal of Crystal Growth

Volume 522, 15 September 2019, Pages 151-159
Journal of Crystal Growth

Production of high performance multi-crystalline silicon ingots for PV application by using contamination-free SixNy seed particles

https://doi.org/10.1016/j.jcrysgro.2019.05.030Get rights and content

Highlights

  • Yield loss of silicon seed layer in HPM silicon ingot production for PV application.

  • Introduction of new contamination-free SixNy seed type to produce HPM-like silicon ingots.

  • SixNy seeded ingots show random grain boundary fractions R of 65%±5%.

  • Cells from SixNy seeded ingots show efficiencies as silicon seeded HPM ingots.

Abstract

In this work a new type of contamination-free SixNy seed particles for the directional solidification of HPM silicon ingots is introduced and evaluated. Several G1 crystallization experiments have been carried out to examine the influence of the seed particle size, the introduced mass and the influence of the composition of the underlying Si3N4 coating at the crucible bottom. Finally, multi-PERC cells over the ingot height from one of the most promising SixNy seeded ingot have been prepared.

The results show that an oxygen contamination is not occurring by the new particles. A minimum seed particle density of around 120/cm2 at the crucible bottom is sufficient to generate a HPM like grain structure with random grain boundary fractions R of 65%±5%, which is very close to typical values of classical silicon seeded HPM. A further increase of the particle density doesn’t lead to a further increase of the R value due to the competition between the very close packed seeds.

While lower oxygen levels of the Si3N4-coating promote significant higher R values in crucible setups without seed particles, the Si3N4-coating composition has almost no influence on the resulting grain structure properties when SixNy seed particles are used. This could be shown even for small seed densities of ~30 cm−2 and a remaining coating area fraction of 80%.

The cell analysis shows same efficiencies of the ingots seeded on the SixNy particles and on the silicon feedstock layer, but a higher wafer yield can be achieved in the case of the SixNy seeding method since a full melt process can be used.

Introduction

The silicon wafer production for photovoltaics is still dominated by multi-crystalline silicon which is produced by the directional solidification technique [1]. This is mainly caused by the emergence of the so called “high performance mc-silicon” or “HPM silicon” since 2011 [2], [3], which makes the multi material still attractive besides the high quality mono-crystalline material produced by the Czochralski (CZ) technique. Meanwhile the production method of the HPM silicon has been improved by replacing the common seeding approach, namely the use of a thick, 10–30 mm high silicon feedstock layer, by thin “functional layers” located directly at the crucible bottom. The benefits of this so called “HPM 2.0” approach are the easier process control at large scales in industrial production (full melting process) and the increased wafer yield due to the homogeneous seeding over the complete bottom area as well as the avoidance of a non-usable, porous silicon seeding layer up to 20 mm thickness.

For the foreign seed assisted growth of industrial HPM silicon ingots typically SiO2 based seeds in terms of slurries or pure particles are used [4], [5]. They are placed in the bottom region of the crucible above or underneath the Si3N4 release coating. The silicon ingots produced hereby show a “HPM-like” microstructure with small grain size and high random grain boundary fractions R at the bottom of the ingot in most cases. However, this seed type material has the disadvantage of a limited nucleation area due to the sintering behavior of SiO2. This is reducing the effective nucleation area when a certain particle density limit has been exceeded and therefore the particles are starting to bake together [4]. Another disadvantage is a higher risk of oxygen incorporation, shown e.g. by Zhang et al. [5] for industrial G5 scale or Hess et al. [6] for laboratory G1 dimensions. They observed a higher oxygen content (up to + 50%), especially in the lower parts of the ingots and a subsequent detrimental LID effect in the produced solar cells.

To overcome these problems, a new type of SixNy seed particles is proposed and evaluated for the industrial production of HPM 2.0 silicon ingots in the present work. For that purpose several G1 crystallization experiments (full melt approach) were carried out. The SixNy particle size, the introduced particle mass as well as the composition of the underlying Si3N4 releasing coating is varied systematically in this work. It will be shown that quite similar grain structure properties and cell efficiencies like in classical HPM silicon material can be achieved by the use and simple application of these particles, but without the disadvantage of additional (oxygen) contamination of the ingot and the loss of a feedstock layer.

Section snippets

Experimental setup and characterization

All crystallization experiments were carried out in a G1 crystallization furnace [7] allowing the growth of silicon ingots with dimensions of 220 × 220 × 130 mm3 and a weight of 15 kg. In all cases, polysilicon feedstock from Wacker was filled into standard fused silica crucibles coated with a high purity Si3N4 layer on the inner sides using Silzot® SQ Si3N4-powder from AlzChem were used. The Si3N4 coating is an inevitable component of the used crucible setups and is applied on the inner

Influence of the seed particle size and mass on the grain structure – Experiment series I and II

In the first experiment series I (experiment 1A – 1E, compare Table 1) the influence of the SixNy seed particle size on the random grain boundary fraction R has been investigated. The measured d50 values for the SixNy particles vary between 0.23 and 1.4 mm. Moreover for the silicon seeded HPM reference, the grain size values of the internal grain structure of the silicon chunks are used (0.07–0.27 mm [10]) for comparison hence it is known from literature that this is the most important

Conclusion

Within this work a new type of contamination-free SixNy seed particles for generating HPM silicon ingots was evaluated concerning its industrial application. By a systematic variation of the seed particle size, introduced seed particle mass or seed particle density at the crucible bottom it was shown, that only a small amount of seed particles providing a seed density of 120/cm2 is sufficient to generate HPM-like grain structures, meaning random grain boundary fractions R > 60%. Additionally,

Declaration of Competing Interest

The authors declare no conflicts of interest.

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