Influence of the Discharge Mode on the Optical and Passivation Properties of SiNx:H Deposited by PECVD at Atmospheric Pressure☆
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open access
Keywords
silicon nitride
antireflective and passivation coating
atmospheric pressure discharges
dielectric barrier discharge (DBD)
Cited by (0)
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Peer review by the scientific conference committee of SiliconPV 2016 under responsibility of PSE AG.
© 2016 The Author(s). Published by Elsevier Ltd.