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Microelectronics Reliability
Volume 40, Issue 11, November 2000, Pages 1911-1914
 
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doi:10.1016/S0026-2714(00)00079-2    
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Copyright © 2000 Elsevier Science Ltd. All rights reserved.

Invited paper

Hooge parameter of InGaAs bulk material and InGaAs 2DEG quantum well structures based on InP substrates

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Jürgen BerntgenCorresponding Author Contact Information, E-mail The Corresponding Author, a, Alexander Behresa, Jürgen Klutha, Klaus Heimea, Walter Daumannb, Uwe Auerb and Franz-Josef Tegudeb

a Institut für Halbleitertechnik, Lehrstuhl I, RWTH Aachen, Templergraben 55, D-52056 Aachen, Germany

b Department of Solid-State Electronics, Gerhard–Mercator Universität Duisburg, Lotharstrasse 55, D-47057 Duisburg, Germany


Received 15 November 1999;
revised 28 February 2000.
Available online 19 October 2000.

Abstract

The 1/f noise of various InGaAs layers lattice matched to InP is investigated systematically at room temperature. To elucidate the origin of the 1/f noise in this type of III–V compound semiconductor, thick n-type doped InGaAs layers, typical InP based InAlAs/InGaAs or InP/InGaAs heterostrucuture field-effect transistor (HFET) structures, respectively, as well as InP based InAlAs/InGaAs quantum well structures with doped InGaAs two-dimensional electron gas (2DEG) channel are analysed. From the experiments it is found that mobility fluctuation is the only origin for the 1/f noise observed both in InGaAs bulk material and in 2DEG heterostructures of high quality. A Hooge parameter attributed to phonon scattering αHphon in the bulk material is found to be about 7×10−6 and agrees with those obtained from HFET structures with the highest mobilities (αH≈1.5×10−5). Furthermore, the Hooge parameter of 2DEG structures strongly depends on the channel design and on the doping concentration in the n-type doped 2DEG channels.

Article Outline

1. Introduction
2. Experimental setup and device structure
2.1. Type 1
2.2. Type 2
2.3. Type 3
2.4. Type 4
3. Experimental results and discussion
4. Conclusion
References

Corresponding Author Contact Information Corresponding author. Tel.: +49-241-807746; fax: +49-241-8888199; email: juergenb@iht.rwth-aachen.de


Microelectronics Reliability
Volume 40, Issue 11, November 2000, Pages 1911-1914
 
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