Particle detection on glass surfaces

doi:10.1016/S0021-8502(05)80095-3

Journal of Aerosol Science

Volume 22, Supplement 1, 1991, Pages S295-S298

https://doi.org/10.1016/S0021-8502(05)80095-3 Get rights and content

Abstract

A simplified model which is based on Mie-theory and vector theory was developed to describe light scattering by a single sphere on a glass plate. Kn an experimental setup a He-Ne laser beam (λ = 0.6328 μm) illuminated a single latex sphere on the surface of a quartz glass plate. The optical system collected the light scattered by the plate and by a single particle with D_p>1 μm in backward direction through the glass plate. The experiment showed the possibility of the detection of individual particles on smooth glass surfaces illuminated from the back using the back scattering light through the glass plate.

Reference (9)

HarrisK.L. et al.
Wafer Inspection Automation : Current and Future Needs
Solid State Technology
(Aug. 1984)
BillatS.B.
Holographic Wafer Inspection
LilienfeldP.
Optical Detection of Particle Contamination on Surfaces: A Review
Aerosol Science and Technology
(1986)
Van de HulstH.C.
Light Scattering by Small Particles
(1981)

There are more references available in the full text version of this article.

Cited by (1)

Comparison of light scattered by a single particle on different surfaces
1992, Journal of Aerosol Science
The problem of light scattering by spheres on reflective surfaces has been studied for many years. There is little concern about the influence of surfaces on the distribution of scattered light by particles on various surfaces. A simplified model based on Mie theory and vector scattering theory was developed. It describes the angular distribution of scattered light by single particle on various surfaces whose surface roughness is much smaller than the wavelength of the illuminating beam and indicated important contributions of surfaces to the particle scattering on surfaces.
The scattered light both by various surfaces and by a single particle on surfaces were investigated experimentally for unpolarized and normally incident illumination. The results showed different characteristics of the angular distribution of scattered light by the same particle on different surfaces.

View full text

Particle detection on glass surfaces

Abstract

Wafer Inspection Automation : Current and Future Needs

Solid State Technology

Holographic Wafer Inspection

Optical Detection of Particle Contamination on Surfaces: A Review

Aerosol Science and Technology

Light Scattering by Small Particles