Backscattering Spectrometry1978, Pages 89-122Chapter 4 - Backscattering Spectrometry of Thin FilmsAuthor links open overlay panelWei-Kan Chu, James W. Mayer, Marc-A. NicoletShow moreOutlineShareCitehttps://doi.org/10.1016/B978-0-12-173850-1.50009-0Get rights and contentRecommended articlesReferences (0)Cited by (0)View full textCopyright © 1978 ACADEMIC PRESS, INC. Published by Elsevier Inc. All rights reserved.