Thermal properties of C/H-, C/H/O-, C/H/N- and C/H/X-grown polycrystalline CVD diamond
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Various HFCVD diamond coatings synergistically tuned using CH<inf>4</inf> gas flow and working pressure and key merit evaluation of their coated tools
2023, International Journal of Refractory Metals and Hard MaterialsThermally stable heavily boron-doped diamond resistors fabricated via selective area growth by hot-filament chemical vapor deposition
2019, Thin Solid FilmsCitation Excerpt :Diamond has attracted considerable attention as a next-generation high-temperature and radiation-proof semiconductor material, which can be used in extreme environments, such as space and in the nuclear industry. In particular, high-temperature operation of diamond devices can be expected owing to its superior physical constants, high thermal conductivity (2200 W/mK) [1], and wide bandgap (5.5 eV) [2]. To realize such electronics, fundamental research on single-crystal diamond growth has been actively pursued, in the fields of large-area growth [3,4]; crystallinity control [5–7]; and doping control with phosphorus [8–10] and boron [11–13] for n- and p-type conduction, respectively.
High-speed synthesis of heavily boron-doped diamond films by in-liquid microwave plasma CVD
2019, Diamond and Related MaterialsCitation Excerpt :Diamond has many excellent properties, such as high stiffness, high thermal conductivity, and transparency [1–3].
Simultaneous determination of the lattice thermal conductivity and grain/grain thermal resistance in polycrystalline diamond
2017, Acta MaterialiaCitation Excerpt :However, while these two factors undoubtedly impact the heat transport in the near nucleation diamond region, still it is poorly understood how to quantify their individual contribution to the reduction of thermal conductivity and how they are related to the emergence of anisotropy in the heat conduction. Typically the quality of the lattice in polycrystalline diamond is typically explored by means of its Raman signal [16]. When approaching the near nucleation diamond it is common to observe features attributed to a low-quality lattice: the sp3 diamond peak becomes broader than for single crystal/bulk CVD diamond, and other features appear in the Raman spectrum apart of the diamond Raman peak (sp2 bonds, transpolyacetylene peaks, etc.) [16,17].
Effects of deposition parameters on microstructure and thermal conductivity of diamond films deposited by DC arc plasma jet chemical vapor deposition
2009, Transactions of Nonferrous Metals Society of China (English Edition)