Copyright © 1996 Published by Elsevier B.V.
The electrical charging of micron-sized dust particles in a capacitively coupled RF plasma
Received 27 November 1995;
revised 6 March 1996;
accepted 12 April 1996.
Communicated by M. Porkolab.
Available online 12 February 1999.
Abstract
The electrical charge of micron-sized particles in a capacitively coupled RF discharge is determined using a relatively simple theoretical model. The specific properties of the RF sheath are taken into account. The results are compared to charge measurements of particles which have been injected into the active discharge.
Keywords: Dusty plasmas; RF discharges
PACS: 52.40.Hf; 52.80.Pi






E-mail Article
Add to my Quick Links

Cited By in Scopus (9)






