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Ultramicroscopy
Volume 52, Issue 1, September 1993, Pages 31-53
 
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doi:10.1016/0304-3991(93)90020-X    How to Cite or Link Using DOI (Opens New Window)
Copyright © 1993 Published by Elsevier Science B.V. All rights reserved.

Coherence and multiple scattering in “Z-contrast” images

M. M. J. Treacy

J. M. Gibson

NEC Research Institute, Inc., 4 Independence Way, Princeton, NJ 08540, USA Department of Physics, University of Illinois, 1110 W. Green Street, Urbana, IL 61801, USA

Received 22 June 1993. 
Available online 31 July 2002.

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Abstract

Hollow-cone dark-field images from crystalline silicon were examined as a function of thickness and scattering angle. We find that both coherent scattering and multiple scattering can cause the intensity to depend non-linearly on thickness, even for high-angle scattering events. A simple method for estimating the effect of multiple elastic scattering in thick specimens is provided. We show theoretically, that a coherence volume exists around each scatterer whose dimensions depend inversely on scattering angle. The coherence volume has a narrow “cigar” shape, elongated along the optic axis. The narrowness ensures that inter-atomic-column interferences, such as zero-order Laue zone Bragg reflections, are suppressed, whereas the elongation permits intra-atomic-column interference (or columnar diffraction). In high-resolution “Z-contrast” images, this bias towards columnar diffraction acts to enhance the signal from atom columns.

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Ultramicroscopy
Volume 52, Issue 1, September 1993, Pages 31-53
 
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