Optimization of ammonia-sensitive metal-oxide-semiconductor structures with platinum gates
References (17)
Hydrogen sensitive MOS-structures. Part 1: Principles and Applications
Sensors and Actuators
(1981)- et al.
Determination of ammonia in air and aqueous samples with a gas-sensitive semiconductor capacitor
Anal. Chim. Acta
(1984) - et al.
Determination of urea with an ammonia gas-sensitive semeconductor device in combination with urease
Anal. Chim. Acta
(1984) - et al.
Biosensors based on ammonia sensitive metal-oxide-semiconductor structures
Sensors and Actuators
(1985) - et al.
The fabrication of amorphous SiO2 substrates suitable for TEM studies of ultra thin polycrystalline films
Thin Solid Films, 145
(1986) Adsorption and decomposition of nitric oxide and ammonia on a stepped platinum single crystal surface
Surface Sci.
(1978)- et al.
Ammonia oxidation on a stepped platinum single-crystal surface
J. Catalysis
(1978) The electronic structure of two forms of molecular ammonia adsorbed on Pt(111)
Chem. Phys. Lett.
(1981)
Cited by (35)
FET-type gas sensors: A review
2021, Sensors and Actuators, B: ChemicalCitation Excerpt :As the operating temperature increases, the dissociation rate of hydrogen-containing gas molecules increases and thus the response of the sensor also increases [78]. But some kinds of hydrogen-containing gases such as NH3 can neither be dehydrogenated at the catalytic metal surface, nor pass through thick and continuous metal film [83,84]. Thus, the metal-gate MOS sensor having a thick and continuous metal gate only can be used to detect H2 gas or hydrogen-containing gas molecules that can be dehydrogenated by the catalytic metal gate.
Recent progress in silicon carbide field effect gas sensors
2019, Semiconductor Gas SensorsRecent trends in silicon carbide (SiC) and graphene-based gas sensors
2013, Semiconductor Gas SensorsNew generation SiC based field effect transistor gas sensors
2013, Sensors and Actuators, B: ChemicalCitation Excerpt :It has been suggested that the reaction with and subsequent removal of oxygen anions from the insulator surface through reverse spill-over is the main mechanism behind the sensitivity towards non-hydrogen containing substances such as CO and NO and indications point to the mechanism, at least partly, also mediating the response to hydrocarbon and similar compounds for such devices [13]. Strong indications also exist for an increased sensitivity to background hydrogen during conditions when the surface is largely depleted of oxygen from reactions with other substances [14] and for the detection of ammonia the necessary existence of three-phase boundaries (gas/metal contact/insulator) has been shown [15] (see also Fig. 2). Tailoring of the selectivity and sensitivity towards different substances can thus be achieved through knowledge about such interactions and a smart choice of identity and structure of the gate and insulator materials as well as operation temperature [4,16–18].
Assembly of hybrid silver-titania thin films for gas sensors
2010, Sensors and Actuators, B: ChemicalTwenty-five years of field effect gas sensor research in Linköping
2007, Sensors and Actuators, B: Chemical