Copyright © 1995 Published by Elsevier Science B.V.
Aberrations of an electrostatic three-cylinder system used to simultaneously focus and deflect charged particles
Available online 7 March 2000.
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Abstract
The properties have been studied of an electrostatic three-cylinder lens-deflector in which the middle cylinder is split longitudinally into four parts, allowing the system to be used to simultaneously focus and deflect a beam of charged particles. The aberrations are found to be of first order in the deflection.






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