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Optimization of a Meander–Spiral Combination Micro Hotplate for Gas Sensors Based on Numerical Analysis

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Abstract

In this paper, we presented the design and simulation results of a platinum meander–spiral combination micro heater for a zinc oxide (ZnO) gas sensor. As a first step, different optimizations have been performed using a finite element analysis in order to obtain a compromise between maximum temperature, maximum homogeneity in active area and minimum power consumption. In the other hand, the effect of ZnO sensitive layer was studied.

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Authors and Affiliations

  1. Research Laboratory of Electronics and Information Technologies, Department of Electrical Engineering, National School of Engineers Sfax, University of Sfax, 3038, Sfax, Tunisia

    S. Bedoui & A. Kachouri

  2. Micro Electro Thermal Systems (METS) Laboratory, Department of Electrical Engineering, National School of Engineering of Sfax, University of Sfax, 3038, Sfax, Tunisia

    S. Gomri

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  1. S. Bedoui
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  2. S. Gomri
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  3. A. Kachouri
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Correspondence to S. Bedoui.

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Bedoui, S., Gomri, S. & Kachouri, A. Optimization of a Meander–Spiral Combination Micro Hotplate for Gas Sensors Based on Numerical Analysis. Trans. Electr. Electron. Mater. 20, 92–98 (2019). https://doi.org/10.1007/s42341-018-0084-y

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