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Activation and pumping characteristics of Ti–Zr–V films deposited on narrow tubes

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Abstract

Non-evaporable getter (NEG) films are an integral part of many particle accelerators. These films provide conductance-free evenly distributed pumping, a low thermal outgassing rate, and a low photon-and electron-stimulated desorption. These characteristics make it an ideal solution for resolving the non-uniform pressure distribution in conductance-limited narrow vacuum tubes. In this study, ternary Ti–Zr–V films were deposited on Si substrates and Ag–Cu (Ag 0.085 wt%) tubes with an inner diameter of 22 mm. All Ti–Zr–V films were prepared from an alloy target using the same DC magnetron sputtering parameters. The compositions and corresponding chemical bonding states were analyzed by X-ray photoelectron spectroscopy after activation at different temperatures. The test particle Monte Carlo (TPMC) method was used to measure the sticking probability of the Ti–Zr–V film based on pressure readings during gas injection. The results indicate that activation commences at temperatures as low as 150 °C and Ti0, Zr0, and V0 exist on the surface after annealing at 180 °C for 1 h. Ti–Zr–V films can be fully activated at 180 °C for 24 h. The CO sticking probability reaches 0.15, with a pumping capacity of 1 monolayer.

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Authors and Affiliations

  1. National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei, 230029, China

    Bang-Le Zhu, Xiao-Qin Ge, Si-Hui Wang, Wei Wei, Yi-Gang Wang, Gong-Fa Liu & Yong Wang

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  1. Bang-Le Zhu
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  2. Xiao-Qin Ge
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  4. Wei Wei
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  7. Yong Wang
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Contributions

All authors contributed to the study conception and design. Material preparation, data collection and analysis were performed by Bang-Le Zhu, Xiao-Qin Ge, Si-Hui Wang and Yong Wang. The first draft of the manuscript was written by Bang-Le Zhu and all authors commented on previous versions of the manuscript. All authors read and approved the final manuscript.

Corresponding author

Correspondence to Bang-Le Zhu.

Additional information

This work was supported by the National Natural Science Foundation of China (Nos. 11975226, 11905219), the Fundamental Research Funds for the Central Universities (No. WK2310000071) and the National Key Research and Development Program of China (2016YFA0402004).

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Zhu, BL., Ge, XQ., Wang, SH. et al. Activation and pumping characteristics of Ti–Zr–V films deposited on narrow tubes. NUCL SCI TECH 32, 50 (2021). https://doi.org/10.1007/s41365-021-00880-4

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