Skip to main content
SpringerLink
Log in

Optical and electrical characterization of AZO films grown on c-plane sapphire substrates by atomic layer deposition

  • Published:
Electronic Materials Letters Aims and scope Submit manuscript

Abstract

We investigated the optical and the electrical properties of Al-doped ZnO (AZO) films grown on c-plane sapphire by varying the growth temperature in an atomic layer deposition system. High-resolution x-ray ω/2θ scans revealed that the (002) peak of the AZO film was clearly developed with increasing growth temperature from 115°C to 235°C. From a surface analysis, we found that the surface grain size of the AZO film increased with growth temperature. In addition, the minimal resistivity (1.21 × 10−3 Ω·cm) and the maximum mobility (19.32 cm2/v-s) were obtained at a growth temperature of 195°C, consistent with the results of PL intensity. These results indicate that the electrical and the optical properties of the AZO films were significantly affected by the growth temperature. From the findings of this study, we believe that the electrical and the optical properties of AZO films can be significantly improved by increasing the crystal domain size of AZO films.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. K. L. Chopra, S. Major, and D. K. Pandya, Thin Solid Films 102, 1 (1983).

    Article  Google Scholar 

  2. D. S. Ginley and C. Bright, MRS Bull. 25, 15 (2000).

    Article  Google Scholar 

  3. Y. S. Lim, S. G. Seo, B. B. Kim, H. S. Choi, W. S. Seo, Y. S. Choo, and H. H. Park, Electron. Mater. Lett. 8, 375 (2012).

    Article  Google Scholar 

  4. D. M. Bagnall, Y. F. Chen, Z. Zhu, T. Yao, S. Koyama, M. Y. Shen, and T. Goto, Appl. Phys. Lett. 70, 2230 (1997).

    Article  Google Scholar 

  5. C. H. Ahn, H. Kim, and H. K. Cho, Thin Solid Films 519, 747 (2010).

    Article  Google Scholar 

  6. M. Chen, Z. L. Pei, C. Sun, J. Gong, R. F. Huang, and L. S. Wen, Mater. Sci. Eng. B 85, 212 (2001).

    Article  Google Scholar 

  7. M. Hiramatsu, K. Imaeda, N. Horio, and M. Nawata, J. Vac. Sci. Technol. A 16, 669 (1998).

    Article  Google Scholar 

  8. J.-H. Bae and H.-K. Kim, Thin Solid Films 516, 7866 (2008).

    Article  Google Scholar 

  9. T.-H. Fang and S.-H. Kang, J. Nanosci. Nanotechno. 10, 405 (2010).

    Article  Google Scholar 

  10. H. Kim, A. Piqué, J. S. Horwitz, H. Mattoussi, H. Murata, Z. H. Kafafi, and D. B. Chrisey, Appl. Phys. Lett. 74, 3444 (1999).

    Article  Google Scholar 

  11. V. Donderis, J. Orozco, J. Cembrero, J. Curiel-Esparza, L. C. Damonte, and M. A. Hernández-Fenollosa, J. Nanosci. Nanotechno. 10, 1387 (2010).

    Article  Google Scholar 

  12. T. W. Kim, D. C. Choo, Y. S. No, W. K. Choi, and E. H. Choi, Appl. Surf. Sci. 253, 1917 (2006).

    Article  Google Scholar 

  13. X. Jiang, F. L. Wong, M. K. Fung, and S. T. Lee, Appl. Phys. Lett. 83, 1875 (2003).

    Article  Google Scholar 

  14. H. Kim, A. Piqué, J. S. Horwitz, H. Murata, Z. H. Kafafi, C. M. Gilmore, and D. B. Chrisey, Thin Solid Films 377, 798 (2000).

    Article  Google Scholar 

  15. F. M. Pai, Y. C. Chen, and C. H. Wu, Electron. Mater. Lett. 9, 771 (2013).

    Article  Google Scholar 

  16. H. J. Kim, H. B. R. Lee, and W. J. Maeng, Thin Solid Films 517, 2563 (2009).

    Article  Google Scholar 

  17. J. W. Elam, D. Routkevitch, and S. M. George, J. Electrochem. Soc. 150, 339 (2003).

    Article  Google Scholar 

  18. J. H. Park, J. M. Shin, S. Y. Cha, J. W. Park, S. Y. Jeong, H. K. Pak, and C. R. Cho, J. Korean Phys. Soc. 49, 584 (2006).

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Department of Nano-Optical Engineering, Korea Polytechnic University, Siheung, 429-839, Korea

    Nak-Jung Choi, Ki-Wook Kim, Hyo-Soo Son & Sung-Nam Lee

Authors
  1. Nak-Jung Choi
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Ki-Wook Kim
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Hyo-Soo Son
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Sung-Nam Lee
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Sung-Nam Lee.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Choi, NJ., Kim, KW., Son, HS. et al. Optical and electrical characterization of AZO films grown on c-plane sapphire substrates by atomic layer deposition. Electron. Mater. Lett. 10, 259–262 (2014). https://doi.org/10.1007/s13391-013-3042-1

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s13391-013-3042-1

Keywords

Search

Navigation