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Comparison of tactile and chromatic confocal measurements of aspherical lenses for form metrology

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Abstract

Both contact and non-contact probes are often used in dimensional metrology applications, especially for roughness, form and surface profile measurements. To perform such kind of measurements with a nanometer level of accuracy, LNE (French National Metrology Institute (NMI)) has developed a high precision profilometer traceable to the SI meter definition. The architecture of the machine contains a short and stable metrology frame dissociated from the supporting frame. It perfectly respects Abbe principle. The metrology loop incorporates three Renishaw laser interferometers and is equipped either with a chromatic confocal probe or a tactile probe to achieve measurements at the nanometric level of uncertainty. The machine allows the in-situ calibration of the probes by means of a differential laser interferometer considered as a reference. In this paper, both the architecture and the operation of the LNE’s high precision profilometer are detailed. A brief comparison of the behavior of the chromatic confocal and tactile probes is presented. Optical and tactile scans of an aspherical surface are performed and the large number of data are processed using the L-BFGS (Limited memory-Broyden-Fletcher-Goldfarb-Shanno) algorithm. Fitting results are compared with respect to the evaluated residual errors which reflect the form defects of the surface.

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Authors and Affiliations

  1. Laboratoire Commun de Métrologie (LNE-CNAM), Laboratoire National de Métrologie et d’Essais (LNE), 1 Rue Gaston Boissier, 75015, Paris, France

    El-Hayek Nadim & Nouira Hichem

  2. Ecole Normale Supérieure de Cachan, University Research Laboratory in Automated Production, 61 avenue du Président Wilson, 94235, Cachan, France

    Anwer Nabil

  3. GEOMNIA: 3D Metrology Engineering and Software Solutions, 165 Avenue de Bretagne, EuraTechnologies, 59000, Lille, France

    Damak Mohamed

  4. Arts et Métiers ParisTech, Laboratory of Information Sciences and Systems (LSIS), 8 Boulevard Louis XIV, 59046, Lille, France

    El-Hayek Nadim, Damak Mohamed & Gibaru Olivier

Authors
  1. El-Hayek Nadim
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  2. Nouira Hichem
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  3. Anwer Nabil
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  4. Damak Mohamed
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  5. Gibaru Olivier
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Correspondence to El-Hayek Nadim.

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Nadim, EH., Hichem, N., Nabil, A. et al. Comparison of tactile and chromatic confocal measurements of aspherical lenses for form metrology. Int. J. Precis. Eng. Manuf. 15, 821–829 (2014). https://doi.org/10.1007/s12541-014-0405-y

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  • DOI: https://doi.org/10.1007/s12541-014-0405-y

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