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Regulating the conductance of tungsten diselenide by oxygen plasma and improving its electrical stability by encapsulation

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Abstract

Two-dimensional (2D) tungsten selenide (WSe2) is promising candidate material for future electronic applications, owing to its potential for ultimate device scaling. For improving the electronic performance of WSe2-based field-effect transistors (FETs), the modification of surface properties is essential. In this study, the seamless structural phase transition in WSe2 lattice is achieved by soft oxygen plasma, regulating the electrical conductance of WSe2-based FETs. We found that during the soft oxygen plasma treatment with optimal processing time, the generated oxygen ions can substitute some selenium atoms and thus locally modify the bond length, inducing 2H → 1T phase transition in WSe2 with seamless interfaces. The mosaic structures have been proven to tailor the electronic structure and increase the hole carrier concentration inside WSe2, significantly increasing the channel conductance of WSe2 FETs. With the further increase of the oxygen plasma treatment time, the creation of more selenium vacancy defects leads to the electronic doping, resulting in the reduction of conductance. Benefiting from the hexagonal boron nitride (h-BN) encapsulation to interrupt the partial structural relaxation from 1T to 2H phase, our WSe2 FET exhibits high electronic stability with conductance of 6.8 × 10−4 S, which is about four orders of magnitude higher than 2H WSe2 (5.8 × 10−8 S). This study could further broaden the WSe2 FETs in applications for functionalization and integration in electronics.

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Acknowledgements

This work was supported by the National Natural Science Foundation of China (No. 11774278) and the Fundamental Research Funds for Central Universities (No. 2012jdgz04).

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  1. Zhaofang Cheng, Shaodan He, and Shimin Zhang contributed equally to this work.

Authors and Affiliations

  1. MOE Key Laboratory for Nonequilibrium Synthesis and Modulation of Condensed Matter, School of Physics, Xi’an Jiaotong University, Xi’an, 710049, China

    Zhaofang Cheng & Minggang Xia

  2. Department of Applied Physics, School of Physics, Xi’an Jiaotong University, Xi’an, 710049, China

    Zhaofang Cheng, Shaodan He, Shimin Zhang, Shijun Duan, Min Wang, Ziyu Liu, Rong Zhang, Wenya Qiang, Xudong Zhang & Minggang Xia

  3. Shaanxi Province Key Laboratory of Quantum Information and Optoelectronic Quantum Devices, School of Physics, Xi’an Jiaotong University, Xi’an, 710049, China

    Minggang Xia

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  1. Zhaofang Cheng
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Regulating the conductance of tungsten diselenide by oxygen plasma and improving its electrical stability by encapsulation

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Cheng, Z., He, S., Zhang, S. et al. Regulating the conductance of tungsten diselenide by oxygen plasma and improving its electrical stability by encapsulation. Nano Res. 17, 3253–3260 (2024). https://doi.org/10.1007/s12274-023-6235-8

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