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Characteristics of laser induced discharge tin plasma and its extreme ultraviolet radiation

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Abstract

In this paper, a CO2 laser induced discharge plasma extreme ultraviolet (EUV) source experimental device was established. The optical emission spectroscopy was used to diagnose the characteristics of the plasma, and the evolution of electron temperature and electron density with time was obtained. The influence of discharge voltage on plasma parameters was analyzed and discussed. The EUV radiation characteristics of the plasma were investigated by self-made grazing incidence EUV spectrometer. The EUV radiation intensity and conversion efficiency were discussed.

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Acknowledgements

This work was supported by the Fundamental Research Funds for the Central Universities (HUST: 2016YXMS028).

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Authors and Affiliations

  1. Wuhan National Research Center for Optoelectronics, Huazhong University of Science and Technology, Wuhan, 430074, China

    Junwu Wang, Xinbing Wang & Duluo Zuo

Authors
  1. Junwu Wang
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  2. Xinbing Wang
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  3. Duluo Zuo
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Corresponding author

Correspondence to Junwu Wang.

Additional information

Junwu WANG, Ph.D., Huazhong University of Science and Technology (HUST). He received the Bachelor degree in Optical Engineering from School of Optical and Electronic Information, HUST in 2014. He is studying for his Ph.D. degree in Wuhan National Laboratory for Optoelectronics, HUST. His main research is laser induced discharge produced plasma EUV source.

Xinbing WANG, professor, Huazhong University of Science and Technology, Wuhan China. He received the Bachelor and Master degrees in Engineering from South East University, Nanjing, China, and Ph.D. degree from Huazhong University of Science and Technology in Physical Electronics in 1997. Now he is working in the Wuhan National Laboratory for Optoelectronics as a professor. His main research is laser produced plasma EUV source.

Duluo ZUO, Ph.D., and Professor of Optical Engineering of Wuhan National Laboratory of Optoelectronics, Huazhong University of Science and Technology (HUST). He got his Bachelor degree in Laser Technology from HUST in 1987, his Master and Ph.D. degrees in Optics from Anhui Institute of Optics and Fine Mechanics in 1990 and 1993. He has been employed by HUST since 1994, mainly engaged in the researches on high power lasers and their applications, such as high power fast axial flow CO2 laser, high energy TEA CO2 laser, laser propulsion, excimer laser and laser-produced plasma light source for microlithography, as well as laser spectroscopy of Raman scattering and its application in gas analysis. Now his main research topics are laser spectroscopy in gas analysis, optically pumped noble gas lasers, and laser-produced plasma source.

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Wang, J., Wang, X. & Zuo, D. Characteristics of laser induced discharge tin plasma and its extreme ultraviolet radiation. Front. Optoelectron. 14, 352–359 (2021). https://doi.org/10.1007/s12200-020-0964-8

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  • DOI: https://doi.org/10.1007/s12200-020-0964-8

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