Abstract
128 × 128, 128 × 160 and 256 × 256 AlGaAs/GaAs quantum well infrared photodetector (QWIP) focal plane arrays (FPA) as well as a large area test device are designed and fabricated. The device with n-doped back-illuminated AlGaAs/GaAs quantum structure is achieved by metal organic chemical vapor deposition (MOCVD) epitaxial growth and GaAs integrated circuit processing technology. The test device is valued by its dark current performance and Fourier transform infrared spectroscopy (FTIR) spectra at 77 K. Cut off wavelengths of 9 and 10.9 μm are realized by using different epitaxial structures. The blackbody detectivity D B* is as high as 2.6 × 109 cm⋅Hz1/2⋅W−1. The 128 6128 FPA is flip-chip bonded on a CMOS readout integrated circuit with indium (In) bumps. The infrared thermal images of some targets under room temperature background have been successfully demonstrated at 80 K operating temperature. In addition, the methods to further improve the image quality are discussed.
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References
Levine B F. Quantum-well infrared photodetectors. Journal of Applied Physics, 1993, 74(8): R1–R81
Levine B F, Zussman A, Kuo J M, et al. 19 μm cutoff long wavelength GaAs/Alx Ga1-x As quantum well infrared photo-detectors. Journal of Applied Physics, 1992, 71(10), 5130–5135
Liu H C, Wasilewski Z R, Buchanan M, et al. Segregation of Si δ doping in GaAs-AlGaAs quantum wells and the cause of the asymmetry in the current-voltage characteristics of intersubband infrared detectors. Applied Physics Letters, 1993, 63(6): 761–763
Gunapala S D, Bandara S V, Singh A, et al. 640 × 486 long-wavelength two-color GaAs/AlGaAs quantum well infrared photodetector (QWIP) focal plane array camera. IEEE Transactions on Electron Devices, 2000, 47(5): 963–971
Gunapala S D, Bandara S V, Liu J K, et al. 1024 × 1024 mid-wavelength and long-wavelength QWIP focal plane arrays for imaging applications. Semiconductor Science and Technology, 2005, 20(5): 473–480
Yu X Z, Guo X D. A 128 × 1 multiquantum well infrared linear array and its signal readout. Infrared Technology, 1999, 21(2): 35–38 (in Chinese)
Li N, Li N, Lu W, et al. Development of 64 × 64 GaAs/AlGaAs MQW long-wave infrared FPAs. Journal of infrared and Millimeter Waves, 1999, 18(6): 427–430 (in Chinese)
Su Y M, Zhong M, Zhang Y B, et al. A 128 × 160 pixel GaAs/ AlGaAs multi-quantum well long-wavelength infrared photo-detector focal plane array. Chinese Journal of Semiconductors, 2005, 26(10): 2044–2047 (in Chinese)
Li X J, Liu Y B, Feng Z, et al. 9 μm cutoff 128 × 128 AlGaAs/ GaAs quantum well infrared photodetector focal plane arrays. Chinese Journal of Semiconductors, 2006, 27(8): 1355–1359
Zussman A, Levine B F, Kuo J M, et al. Extended long-wavelength λ = 11−15 μm GaAs/Alx Ga1™x As quantum-well infrared photodetectors. Journal of Applied Physics, 1991, 70(9): 5101–5107
Gunapala S D, Bandara S V. Quantum well infrared photo-detector (QWIP) focal plane arrays. Semiconductors and Semimetals, 1999, 62: 197–282
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Translated and revised from Infrared and Laser Engineering, 2007, 36(4): 435–438 [译自: 红外与激光工程]
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Li, X., Liu, Y., Feng, Z. et al. AlGaAs/GaAs quantum well infrared photodetector focal plane array based on MOCVD technology. Front. Optoelectron. China 1, 313–317 (2008). https://doi.org/10.1007/s12200-008-0051-z
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DOI: https://doi.org/10.1007/s12200-008-0051-z