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SiC/Mg multilayer reflective mirror for He-II radiation at 30.4 nm and its thermal stability

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Abstract

In applications of solar physics, extreme ultraviolet imaging of solar corona by selecting the He-II (λ = 30.4 nm) emission line requires high reflectivity multilayer mirrors. Some material combinations were studied to design the mirrors working at a wavelength of 30.4 nm, including SiC/Mg, B4C/Mg, C/Mg, C/Al, Mo/Si, B4C/Si, SiC/Si, C/Si, and Sc/Si. Based on optimization of the largest reflectivity and the narrowest width for the multilayer mirror, a SiC/Mg material combination was selected as the mirror and fabricated by a magnetron sputtering system. The layer thicknesses of the SiC/Mg multilayer were measured by an X-ray diffractometer.

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References

  1. Ravet M F, Bridou F, Zhang-Song X, et al. Ion beam deposited Mo/Si multilayers for EUV imaging applications in astrophysics. Proceedings of SPIE, 2004, 5250: 99–108

    Article  Google Scholar 

  2. Gardner L, Kohl J, Cranmer S, et al. The advanced solar coronal explorer mission (ASCE). Proceedings of SPIE, 1999, 3764: 134–146

    Article  Google Scholar 

  3. Grigonis M, Knystautas E J. C/Si multilayer mirrors for the 25–30 nm wavelength region. Applied Optics, 1997, 36(13): 2839–2842

    Article  Google Scholar 

  4. Zhang Z, Wang Z S, Qin S J, et al. The design of X-ray supermirror with broad angle range. Acta Photonica Sinica, 2003, 32(2): 253–256 (in Chinese)

    Google Scholar 

  5. Vial J C, Song X Y, Lemaire P, et al. The solar high-resolution imager-coronagraph LYOT mission. Proceedings of SPIE, 2003, 4853: 479–489

    Article  Google Scholar 

  6. Windt D L, Donguy S, Seely J F, et al. EUV multilayers for solar physics. Proceedings of SPIE, 2004, 5168: 1–11

    Article  Google Scholar 

  7. Wang F L, Wang Z S, Qin S J, et al. Investigation of ultra-short-period W/C multilayers for soft X-ray optics. Chinese Optics Letters, 2005, 3(7): 425–427

    MathSciNet  Google Scholar 

  8. Zhang Z, Wang Z S, Wang F L, et al. Design and fabrication of broad angular range depth-graded C/W multilayer mirror for hard X-ray optics. Chinese Optics Letters, 2005, 3(7): 422–424

    Google Scholar 

  9. Chen B, Ni Q L, Cao J H, et al. Development of a space soft X-ray and EUV normal incidence telescope. Optics and Precision Engineering, 2003, 11(4): 315–319 (in Chinese)

    Google Scholar 

  10. Wang Z S, Zhang S M, Wu W J, et al. B4C/Mo/Si high reflectivity multilayer mirror at 30.4 nm. Chinese Optics Letters, 2006, 4(10): 611–613

    Google Scholar 

  11. Wang Z S, Wang H C, Zhu J T, et al. Broad angular multilayer analyzer for soft X-rays, Optics Express, 2006, 14(6): 2533–2538

    Article  Google Scholar 

  12. Wang Z S, Wang H C, Zhu J T, et al. Broadband multilayer polarizers for the extreme ultraviolet. Journal of Applied Physics, 2006, 99(5): 056108

    Article  Google Scholar 

  13. Wang Z S, Wang H C, Zhu J T, et al. Extreme ultraviolet broadband Mo/Y multilayer analyzers. Applied Physics Letters, 2006, 89(24): 241120

    Article  Google Scholar 

  14. Wang Z S, Wang H C, Zhu J T, et al. Broadband Mo/Si multilayer transmission phase retarders for the extreme ultraviolet. Applied Physics Letters, 2007, 90(3): 031901

    Article  Google Scholar 

  15. Wang H C, Zhu J T, Wang Z S, et al. Broadband Mo/Si multilayer analyzers for the 15–17 nm wavelength range. Thin Solid Films, 2006, 515(4): 2523–2526

    Article  Google Scholar 

  16. Spiller E. Reflective multilayer coatings for the far UV region. Applied Optics, 1976, 15(10): 2333–2338

    Article  Google Scholar 

  17. Wang Z S, Ma Y Y. Researches on extreme ultraviolet multilayers fabrication. Optical Technique, 2001, 27(6): 532–534 (in Chinese)

    MathSciNet  Google Scholar 

  18. Wang H C, Wang Z S, Qin S J, et al. Analysis of the reflectivity of Mo/Si multilayer film for soft X-ray. Acta Optica Sinica, 2003, 23(11): 1362–1365 (in Chinese)

    Google Scholar 

  19. Wang Z S. Effect of film thickness errors on performance of soft X-ray multilayer. Optics and Precision Engineering, 2003, 11(2): 136–138 (in Chinese)

    Google Scholar 

  20. Zhu J T, Wang Z S, Zhang S M, et al. High reflectivity multilayer mirror for He-II radiation at 30.4 nm in solar physics application, In: Optical Interference Coatings 2007, Tucson: Optical Society of America, 2007, FA9

    Google Scholar 

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Authors and Affiliations

  1. Institute of Precision Optical Engineering and Technology, Physics Department, Tongji University, Shanghai, 200092, China

    Jingtao Zhu, Da Xu, Shumin Zhang, Wenjuan Wu, Zhong Zhang, Fengli Wang, Bei Wang, Cunxia Li, Yao Xu, Zhanshan Wang & Lingyan Chen

  2. National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei, 230029, China

    Hongjun Zhou & Tonglin Huo

Authors
  1. Jingtao Zhu
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  2. Da Xu
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  3. Shumin Zhang
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  4. Wenjuan Wu
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  5. Zhong Zhang
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  6. Fengli Wang
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  7. Bei Wang
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  8. Cunxia Li
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  9. Yao Xu
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  10. Zhanshan Wang
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  11. Lingyan Chen
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  12. Hongjun Zhou
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  13. Tonglin Huo
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Corresponding author

Correspondence to Jingtao Zhu.

Additional information

Translated and revised from Acta Optica Sinica, 2007, 27(4): 735–738 [译自: 光学学报]

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Zhu, J., Xu, D., Zhang, S. et al. SiC/Mg multilayer reflective mirror for He-II radiation at 30.4 nm and its thermal stability. Front. Optoelectron. China 1, 305–308 (2008). https://doi.org/10.1007/s12200-008-0028-y

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