Abstract
Direct electron beam lithography technique is used for writing a variety of waveguide structures on thin films of polymethyl methacrylate (PMMA) and self-assembled three-dimensionally ordered photonic crystals made up of PMMA colloidal spheres. The waveguide structures fabricated on both these type of samples are characterized by scanning electron microscope and optical microscope images.
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KEDIA, S., VIJAYA, R. Photonic crystal waveguides by direct writing of e-beam on self-assembled photonic crystals. Bull Mater Sci 34, 383–388 (2011). https://doi.org/10.1007/s12034-011-0063-y
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DOI: https://doi.org/10.1007/s12034-011-0063-y