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Fabrication of ordered micro- and nano-scale patterns based on optical discs and nanoimprint

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Abstract

A simple method to fabricate one-dimensional (1-D) and two-dimensional (2-D) ordered micro- and nano-scale patterns is developed based on the original masters from optical discs, using nanoimprint technology and soft stamps. Polydimethylsiloxane (PDMS) was used to replicate the negative image of the 1-D grating pattern on the masters of CD-R, DVD-R and BD-R optical discs, respectively, and then the 1-D pattern on one of the PDMS stamps was transferred to a blank polycarbonate (PC) substrate by nanoimprint. The 2-D ordered patterns were fabricated by the second imprinting using another PDMS stamp. Different 2-D periodic patterns were obtained depending on the PDMS stamps and the angle between the two times of imprints. This method may provide a way for the fabrication of complex 2-D patterns using simple 1-D masters.

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Authors and Affiliations

  1. Key Laboratory of Advanced Transducers and Intelligent Control System, Ministry of Education and Shanxi Province, Colleges of Physics and Optoelectronics, Taiyuan University of Technology, Taiyuan, 030024, China

    Hui-jing Guo  (郭慧晶), Xiao-liang Zhang  (张校亮) & Xiao-chun Li  (李晓春)

Authors
  1. Hui-jing Guo  (郭慧晶)
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  2. Xiao-liang Zhang  (张校亮)
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  3. Xiao-chun Li  (李晓春)
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Corresponding author

Correspondence to Xiao-liang Zhang  (张校亮).

Additional information

This work has been supported by the National Natural Science Foundation of China (Nos.11504259, 21575098 and 21505098), the Shanxi International Cooperation Project (No.2015081019), the Shanxi Scholarship Council (No.2013-038), the Scientific and Technological Innovation Programs of Higher Education Institutions in Shanxi (No.2015123), and the Scientific Research Starting Foundation from Taiyuan University of Technology (No.tyut-rc201162a).

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Guo, Hj., Zhang, Xl. & Li, Xc. Fabrication of ordered micro- and nano-scale patterns based on optical discs and nanoimprint. Optoelectron. Lett. 12, 241–244 (2016). https://doi.org/10.1007/s11801-016-6097-z

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  • DOI: https://doi.org/10.1007/s11801-016-6097-z

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