Abstract
A type of spatial modulating micro Fourier transform spectrometer (FTS) based on micro multi-step mirrors (MMSMs) is designed and manufactured in this paper. The interference system is based on Michelson interferometer, using two MMSMs instead of plane mirrors in two arms. The recovered spectrum is simulated with different distances between MMSMs and the detector, and the influence of diffraction on the recovered spectrum is analyzed. The edge-enlarging method for the MMSMs is proposed to eliminate edge noise, and the influence of surface roughness of MMSMs on the recovered spectrum is also analyzed. Moreover, the way of manufacturing the MMSMs is investigated.
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References
K. R. Bambery, Biochimica et Biophysica Acta 1758, 900 (2006).
WU Jun, FANG Yong-hua and YE Han-han, Spectroscopy and Spectral Analysis 33, 1281 (2013).
LIU Chun-long, WANG Hong-li, FANG Xiang-yi and CHENG Xiang-ming, Chinese Journal of Sensor and Actuators 23, 635 (2010).
Jeongsik Sin, Woo Ho Lee, Dan Popa and Harry E. Stephanou, Proc. of SPIE 6109, 1 (2006).
Ulrike Wallrabe, Christian Solf, Jurgen Mohr and Jan G. Korvink, Sensors and Actuators A 123, 459 (2005).
Manzardo, Micro-sized Fourier Spectrometers, Univ. Neuchâtel, Switzerland, 2002.
Dong Ying, Xiang Li-Bin and Zhao Baochang, Acta Optica Sinaca 21, 330 (2001). (in Chinese)
LIN Xue-song, WANG Shu-rong and LI Fu-tian, Optics and Precision Engineering 13, 691 (2005). (in Chinese)
WU Xiao-fang and ZHU Hao, Physics Experimentation 26, 9 (2006).
SHI Lei, LIU Jia and ZHENG Xin-wen, Spectroscopy and Spectral Analysis 32, 1712 (2012).
SHI Jun-feng, HUI Mei and WANG Dong-sheng, Optical Technique 29, 13 (2003). (in Chinese)
WANG Yong-qing, MA Wen and WANG Hai-zhou, Metallurgical Analysis 26, 40 (2006). (in Chinese)
FAN Dong-dong and BAI Shao-jun, Spacecraft Recovery & Remote Sensing 34, 59 (2013).
LIU Ri-long and YIN De-kui, Infrared 30, 20 (2009). (in Chinese)
Muller K D, Applied Optics 34, 1493 (1995).
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This work has been supported by the National Natural Science Foundation of China (Nos.61027010 and 61376122), Jilin Province Science and Technology Development Plan (Nos.201205025 and 20130206010GX), Changchun Science and Technology Plan (No.11DJ03) and State Key Laboratory of Applied Optics Own Funds.
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Qin, Yx., Liang, Jq., Liang, Zz. et al. Design and experimental research on a visible-near infrared spatial modulating Fourier transform spectrometer based on micro multi-step mirrors. Optoelectron. Lett. 10, 172–175 (2014). https://doi.org/10.1007/s11801-014-3178-8
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DOI: https://doi.org/10.1007/s11801-014-3178-8