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Nanoimprint lithography for the manufacturing of flexible electronics

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Abstract

Flexible electronics have received considerable attention in academies and industries for their promising applications in enormous fields, such as flexible displays, wearable sensors, artificial skins, and flexible energy devices. Challenges remain in developing a flexible and scalable manufacturing method to facilitate the fabrication of multi-functional structures in a flexible electronic system. Nanoimprint lithography is a high resolution and low-cost approach to fabricate nanostructures over a large area. This paper reviews recent progress of nanoimprint lithography and its applications in flexible electronics. The basic principles, classification, research focus, and critical issues of nanoimprint lithography are elaborated. Then, the advantages of nanoimprint lithography are demonstrated in several typical applications related to flexible electronics, including conductive films, optoelectronic devices, flexible sensors, energy harvesting and storage devices, and bioinspired electronic devices. Finally, the challenges and perspectives of nanoimprint lithography in flexible electronic systems are discussed.

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  1. State Key Laboratory for Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an, 710049, China

    JinYou Shao, XiaoLiang Chen, XiangMing Li, HongMiao Tian, ChunHui Wang & BingHeng Lu

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Shao, J., Chen, X., Li, X. et al. Nanoimprint lithography for the manufacturing of flexible electronics. Sci. China Technol. Sci. 62, 175–198 (2019). https://doi.org/10.1007/s11431-018-9386-9

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