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A New Method for Measuring Normal Forces with Accurate Gap Control Using a Microfabricated Quartz Resonator for Lubrication at Nanometer Gaps

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Abstract

A new method using a microfabricated quartz double-ended tuning fork (DETF) resonator is presented for simultaneously measuring normal and lateral forces with accurate gap control. The quartz resonator provides high force sensitivity due to its smaller device size. An optical fiber probe for lateral force detection was combined with the resonator by adding a support frame, thereby for increasing lateral rigidity. The normal and lateral forces exerted by a lubricant in nanometer-sliding gaps were simultaneously measured using the quartz DETF resonator with the optical fiber probe. This method is useful for clarifying the tribological properties in small sliding gaps for micro/nano-mechanical devices such as the head–disk interface of hard disk drives.

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Acknowledgments

This study was supported in part by the SENTAN, the Japan Science Technology Agency and by the Storage Research Consortium.

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Authors and Affiliations

  1. Department of Micro/Nano Systems Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya, 464-8603, Japan

    Kenji Fukuzawa, Yuki Yamauchi, Yusuke Naito & Shintaro Itoh

  2. Department of Complex Systems Science, Nagoya University, Furo-cho, Chikusa-ku, Nagoya, 464-8603, Japan

    Hedong Zhang

Authors
  1. Kenji Fukuzawa
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  2. Yuki Yamauchi
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  3. Yusuke Naito
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  4. Shintaro Itoh
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  5. Hedong Zhang
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Corresponding author

Correspondence to Kenji Fukuzawa.

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Fukuzawa, K., Yamauchi, Y., Naito, Y. et al. A New Method for Measuring Normal Forces with Accurate Gap Control Using a Microfabricated Quartz Resonator for Lubrication at Nanometer Gaps. Tribol Lett 43, 121–128 (2011). https://doi.org/10.1007/s11249-011-9810-x

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  • DOI: https://doi.org/10.1007/s11249-011-9810-x

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