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Tribological properties of bio-mimetic nano-patterned polymeric surfaces on silicon wafer

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Abstract

Nano-patterns made of poly(methyl methacrylate) (PMMA) were fabricated on silicon wafer using a capillarity-directed soft lithographic technique. Patterns with three different aspect ratios were investigated for their adhesion and friction properties at nano-scale and for friction at micro-scale. The patterned samples exhibited superior tribological properties, at both these scales when compared to those of flat PMMA thin films.

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Acknowledgments

This research was supported by a grant (05 K1401 – 00930) from Center for Nano-scale Mechatronics and Manufacturing of 21st Century Frontier Research Program. This work was also supported in part by the Micro Thermal System Research Center and Engineering Research Institute of Seoul National University.

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Authors and Affiliations

  1. Tribology Research Center, Korea Institute of Science and Technology, Cheongryang, P.O. Box 131, 130-650, Seoul, Korea

    E.-S. Yoon, R.A. Singh & H. Kong

  2. Microsystem Research Center, Korea Institute of Science and Technology, Seoul, Korea

    B. Kim & D.-H. Kim

  3. School of Mechanical and Aerospace Engineering, Seoul National University, Seoul, Korea

    H.E. Jeong & K.Y. Suh

Authors
  1. E.-S. Yoon
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  2. R.A. Singh
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  3. H. Kong
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  4. B. Kim
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  5. D.-H. Kim
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  6. H.E. Jeong
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  7. K.Y. Suh
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Correspondence to E.-S. Yoon.

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Yoon, ES., Singh, R., Kong, H. et al. Tribological properties of bio-mimetic nano-patterned polymeric surfaces on silicon wafer. Tribol Lett 21, 31–37 (2006). https://doi.org/10.1007/s11249-005-9005-4

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  • DOI: https://doi.org/10.1007/s11249-005-9005-4

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