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Excitation of Electronic States of N2 in Radio-Frequency Electric Field by Electron Impact

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Abstract

Excitation of electronic states of the N2 molecule by electron impact is recognized as an essential process in nitrogen plasmas that strongly impacts their chemical reactivity and other properties. Many surface and coating technologies are based on radio-frequency plasma discharges in nitrogen. In this paper the electron impact excitation rate coefficients for singlet and triplet electronic states of the N2 molecule have been calculated in non-equilibrium conditions in the presence of a radio-frequency electric field. A Monte Carlo simulation has been performed in order to determine non-equilibrium electron energy distribution functions within one period of the electric field. By using these distribution functions, the excitation rate coefficients have been obtained in the frequency range from 13.56 up to 500 MHz, at reduced electric field values from 200 to 700 Td.

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Acknowledgements

This work was supported in part by the Ministry of Education, Science and Technological development of the Republic of Serbia by the Project No. 171016.

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Authors and Affiliations

  1. Faculty of Physical Chemistry, University of Belgrade, Studentski trg 12-16, Belgrade, 11000, Serbia

    Miroslav M. Ristić

  2. Faculty of Physics, University of Belgrade, Studentski trg 12-16, Belgrade, 11000, Serbia

    Muna M. Aoneas, Mirjana M. Vojnović & Goran B. Poparić

Authors
  1. Miroslav M. Ristić
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  2. Muna M. Aoneas
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  3. Mirjana M. Vojnović
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  4. Goran B. Poparić
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Correspondence to Miroslav M. Ristić.

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Ristić, M.M., Aoneas, M.M., Vojnović, M.M. et al. Excitation of Electronic States of N2 in Radio-Frequency Electric Field by Electron Impact. Plasma Chem Plasma Process 37, 1431–1443 (2017). https://doi.org/10.1007/s11090-017-9826-6

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  • DOI: https://doi.org/10.1007/s11090-017-9826-6

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